Abstract: A translational optical shutter for a fiber optic switch uses movable mirrors at all matrix cross-points formed by micro electromechanical techniques from a single crystal silicon wafer which is of the 110 crystal plane type and which has been preferentially etched in the 111 plane to provide the appropriate mirror switching surface at the same time as the actuator for the mirror.

Abstract: An angular rate sensor made from a structural wafer of single crystal silicon has a pair of proof masses lying in an X-Y plane and supported by a circular frame. The masses are driven into oscillation in the X-direction using an interdigitated comb drive. Rotation of the sensor about the Z-axis induces Coriolis forces which cause the frame to rotate, the rotation of the frame being indicative of the angular rate of the sensor. A parallel plate sensor located outside of the circular frame senses rotation of the frame.

Abstract: A silicon monolithic miniature intra-ocular pressure sensing probe utilizes pressure sensing piezoresistors attached to a silicon pressure sensing membrane which is directly exposed to the irrigating fluid used during an eye operation, for example. From a silicon fabrication point of view, this is a micro electromechanical (MEM) device and the integration of the piezoresistive pressure sensor directly into the cannula which is inserted into the eye is partially made possible by providing p++ etch stops to gain access for electrical connection to the piezoresistive elements arranged in a Wheatstone bridge configuration. The silicon sensing membrane forms a smooth surface to avoid turbulence and is close to the eye to minimize error.

Abstract: An occlusion implant device for small body lumens consisting of a micromachined monocrystalline silicon disk which has inherently spring loaded integral helical wings which when released by the insertion device anchors the implant in position. The device may be used for contraception vasco-occlusion for treatment of aneurysms and with an aperture therethrough may also be utilized as a stent. Alternatively, a micro mold of silicon may be formed and a metal or plastic disk produced by injection molding.