Patents Assigned to SNW COMPANY LIMITED
  • Buffer chamber unit for wafer processing equipment
    Patent number: 11087999
    Abstract: The present invention relates to a buffer chamber unit for wafer processing equipment.
    Type: Grant
    Filed: November 10, 2017
    Date of Patent: August 10, 2021
    Assignee: SNW COMPANY LIMITED
    Inventor: Taehoon Kim
  • BUFFER CHAMBER UNIT FOR WAFER PROCESSING EQUIPMENT
    Publication number: 20190341282
    Abstract: The present invention relates to a buffer chamber unit for wafer processing equipment.
    Type: Application
    Filed: November 10, 2017
    Publication date: November 7, 2019
    Applicant: SNW COMPANY LIMITED
    Inventor: Taehoon KIM