Patents Assigned to Steag-Ast GmbH
  • Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems
    Patent number: 5841110
    Abstract: A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.
    Type: Grant
    Filed: August 27, 1997
    Date of Patent: November 24, 1998
    Assignee: Steag-Ast GmbH
    Inventors: Zsolt Nenyei, Heinrich Walk, Michael Maurer, Thomas Knarr