Patents Assigned to STMicrlelectronics S.r.l.
  • Patent number: 6405592
    Abstract: A sensor with a movable microstructure including a sensitive element, formed in a first chip of semiconductor material for producing an electrical signal dependent on a movement of at least one movable microstructure relative to a surface of the first chip. The sensitive element is enclosed in a hollow hermetic structure, and circuitry for processing the electrical signal is formed in a second chip of semiconductor material. The hollow hermetic structure includes a metal wall disposed on the surface of the first chip around the sensitive element, and the second chip is fixed to the metal wall.
    Type: Grant
    Filed: June 19, 1998
    Date of Patent: June 18, 2002
    Assignee: STMicrlelectronics S.r.l.
    Inventors: Bruno Murari, Benedetto Vigna, Paolo Ferrari