Abstract: A sensor with a movable microstructure including a sensitive element, formed in a first chip of semiconductor material for producing an electrical signal dependent on a movement of at least one movable microstructure relative to a surface of the first chip. The sensitive element is enclosed in a hollow hermetic structure, and circuitry for processing the electrical signal is formed in a second chip of semiconductor material. The hollow hermetic structure includes a metal wall disposed on the surface of the first chip around the sensitive element, and the second chip is fixed to the metal wall.
Type:
Grant
Filed:
June 19, 1998
Date of Patent:
June 18, 2002
Assignee:
STMicrlelectronics S.r.l.
Inventors:
Bruno Murari, Benedetto Vigna, Paolo Ferrari