Abstract: A hybridization detecting device, wherein a probe cell has a body of semiconductor material forming a diaphragm, a first electrode on the diaphragm, a piezoelectric region on the first electrode, a second electrode on the piezoelectric region and a detection layer on the second electrode. The body accommodates a buried cavity downwardly delimiting the diaphragm.
Type:
Application
Filed:
December 29, 2009
Publication date:
July 1, 2010
Applicant:
STMicroeletronics S.r.I.
Inventors:
Ubaldo Mastromatteo, Flavio Francesco Villa, Gabriele Barlocchi