Abstract: An electrical resistance type humidity sensor is herein disclosed which comprises a humidity sensor in which electrodes are formed on a woodceramics substrate having linear characteristics with humidity, and a temperature sensor for temperature correction in which electrodes are formed on other woodceramics substrate having the identical characteristics as in the woodceramics humidity sensor and a film coating of a nonhygroscopic material is formed on the surface of the substrate. Thus, a resistance value measured by the woodceramics humidity sensor is corrected on the basis of a resistance value measured by the woodceramics temperature sensor to obtain an output voltage in proportion to a relative humidity. A structure insensitive to a humidity formed from all the same material i.e.
Type:
Grant
Filed:
January 15, 1998
Date of Patent:
May 8, 2001
Assignees:
Suda Toshikazu, Sanriki Kogyo Kabushiki Kaisha