Patents Assigned to SUMITOMO METAL FINE TECHNOLOGY CO., LTD.
  • GRINDING METHOD AND GRINDING APPARATUS FOR POLISHING PAD FOR USE IN DOUBLE-SIDE POLISHING DEVICE
    Publication number: 20110065365
    Abstract: The present invention provides an apparatus capable of uniformly grinding an polishing pad. Further, the present invention provides a method of grinding an polishing pad by using the grinding apparatus.
    Type: Application
    Filed: September 13, 2010
    Publication date: March 17, 2011
    Applicants: SUMCO CORPORATION, SUMITOMO METAL FINE TECHNOLOGY CO., LTD.
    Inventors: Hiroto Fukushima, Tomonori Miura, Yasuhiko Tsukanaka, Takeshi Ezaki