Patents Assigned to Sumitomo Mitsubishi Silicon Corporation, Ltd.
  • Patent number: 6645296
    Abstract: To miniaturize a crystal holding apparatus which mechanically holds and pulls up a single crystal at a top thereof. To avoid harmful influence on crystal growing resulting from crystal holding. A plurality of pivot clamps 40, 40 are circumferentially mounted at regular intervals on a cylindrical frame 30 which lifts and lowers and rotates for pulling up the single crystal. A clamp operation mechanism 50 is incorporated in the frame 30, which is pushed by a seed chuck 2 lifting in the frame 30 to shift the pivot clamps 40, 40 from an open condition to a close condition. The clamp operation mechanism 50 shifts the pivot clamps 40, 40 from the open condition to close condition when a neck passes inside the pivot clamps 40, 40, and release the pivot clamps 40, 40 after the shift.
    Type: Grant
    Filed: January 8, 2002
    Date of Patent: November 11, 2003
    Assignee: Sumitomo Mitsubishi Silicon Corporation, Ltd.
    Inventors: Yoshihiro Akashi, Teruo Kageyama