Abstract: An apparatus for generation of a linear arc discharge for plasma processing, particularly for processing on surfaces of solid substrates, installed in a reactor held at gas pressures below 5.times.10.sup.4 Pa and powered by a generator of alternating current (10), includes: at least one pair of a first electrode plate (1) and a second electrode plate (2) placed opposite to each other at a distance exceeding 0.4 mm and connected to the same pole of the generator which has counter pole connected to a counter electrode (3), a magnetic field produced by magnets (4) for development of a linear hot zone (5) on the first electrode plate and a linear hot zone (6) on the second electrode plate, which have a component of at least 10.sup.-3 Tesla across the slit between these electrode plates, an ionized environment (7) containing a working gas (8) involved between the electrode plates and having an electrical contact with the electrode plates where an arc discharge (9) is generated and with the counter electrode.

Abstract: A method and apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation comprising the steps of: (a) generation of a radio frequency discharge by a radio frequency electrode of a hollow geometry in an auxiliary gas introduced into the discharge area at a pressure necessary for an initiation of a hollow cathode discharge inside the hollow electrode causing sputtering and/or evaporation of the electrode surface; (b) increasing the radio frequency power to said hollow electrode to enhance density of vapors containing particles released from the electrode by the sputtering and/or evaporation in the radio frequency generated hollow cathode discharge up to a density at which a self-sustained discharge remains after the inflow of said auxiliary gas is closed and the pumping of gas is adjusted to a value necessary for the maintenance of the discharge. The hollow radio frequency electrode may serve as an inlet of said auxiliary gas.