Abstract: A travel robot for moving a substrate transfer robot in a transfer chamber includes: an elevating part for driving an elevating drive shaft installed in the transfer chamber, a first travel link arm engaged with the elevating drive shaft, a second and a third travel link arm respectively having a first and a second driving motors installed therein, wherein two travel drive shafts are interlocked with the first driving motor and their corresponding travel output shafts, wherein the travel drive shafts and the travel output shafts are installed on the first travel link arm, wherein a rotation drive shaft interlocked with the second driving motor and a rotation output shaft interlocked with the rotation drive shaft and the substrate transfer robot are installed on the third travel link arm, and wherein the travel output shafts are engaged with the first and the third travel link arm.

Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.