Abstract: A gas scrubber system for purifying waste gas into clean air has first and second waste gas combustors for oxidizing waste gas introduced thereinto by heat and hot filtering particulates present in the oxidized waste gas, a gas channel switching unit for controlling flow of the waste gas introduced into the first and the second waste gas combustors, first and second coolers disposed downstream of the first and the second waste gas combustors for cooling down the oxidized waste gas discharged from the first and the second waste gas combustors, and a cold filtering unit disposed downstream of the first and the second coolers for filtering particulates present in the cold waste gas discharged from the first and the second coolers.

Abstract: A photoresist dispensing device for use in applying a metered amount of photoresist on a wafer comprises, a photoresist storage tank, a nozzle for spraying the photoresist on the wafer, a feeder unit for drawing a metered amount of the photoresist out of the storage tank and discharging it through the nozzle, a pneumatic control unit for controlling the operation of the feeder unit with the use of pressurized air; and a filter disposed in between the storage tank and the feeder unit for removing alien matters present the photoresist.