Abstract: Methods and systems for the destruction of one or more PFCs in a gas stream are provided. The gas stream can come from semiconductor processing, for example. The PFCs in the gas stream are reacted with steam in the presence of a catalyst to fragment the PFCs into other compounds that are readily removed from the gas stream. The catalyst comprises gallium, and can additionally comprise zirconium oxide. The gas stream can also be pre-treated prior to reacting the PFCs with steam to remove substances that could be deleterious to the catalyst.

Abstract: An apparatus and method for removing volatile organic compounds (VOCs) from a stream of contaminated air using an adsorbent material. The stream of contaminated air is introduced into an end of a first hollow member which contains the adsorbent material. A perforated member disposed within the hollow member is configured to increase the air stream velocity such that dispersed particles of the adsorbent material are entrained in the air stream. Entrainment of the adsorbent in the contaminated air stream facilitates efficient removal of the VOCs. The cleaned air stream exits from a second end of the first hollow member, and the adsorbent material, having a quantity of VOCs adsorbed thereon, is directed to a reconditioning apparatus wherein the VOCs are thermally desorbed. The reconditioned adsorbent material is then returned to the first hollow member.