Patents Assigned to TEITSU ENGINEERING CO., LTD.
  • Patent number: 9211627
    Abstract: Provided is a polishing apparatus capable of maintaining polishing precision although fewer expendable parts are periodically replaced. The polishing apparatus includes a polishing disk (20) having a polishing surface (20a) on the front side thereof to polish an end surface of a workpiece, a support mechanism (30) for supporting a back surface (20b) of the polishing disk (20) while allowing the polishing disk (20) to move along a predetermined plane, a workpiece holder (50) for holding the workpiece so as to contact the end surface of the workpiece with the polishing surface of the polishing disk, and a driving mechanism (70) for concurrently causing circular and reciprocating rectilinear motions of the polishing disk (20).
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: December 15, 2015
    Assignees: NTT Advanced Technology Corporation, Teitsu Engineering Co., LTD.
    Inventors: Kazutoshi Andou, Toshinori Kimura, Sadaaki Mizuno
  • Publication number: 20130331008
    Abstract: Provided is a polishing apparatus capable of maintaining polishing precision although fewer expendable parts are periodically replaced. The polishing apparatus includes a polishing disk (20) having a polishing surface (20a) on the front side thereof to polish an end surface of a workpiece, a support mechanism (30) for supporting a back surface (20b) of the polishing disk (20) while allowing the polishing disk (20) to move along a predetermined plane, a workpiece holder (50) for holding the workpiece so as to contact the end surface of the workpiece with the polishing surface of the polishing disk, and a driving mechanism (70) for concurrently causing circular and reciprocating rectilinear motions of the polishing disk (20).
    Type: Application
    Filed: February 9, 2012
    Publication date: December 12, 2013
    Applicants: TEITSU ENGINEERING CO., LTD., NTT ADVANCED TECHNOLOGY CORPORATION
    Inventors: Kazutoshi Andou, Toshinori Kimura, Sadaaki Mizuno