Abstract: Methods for producing a junction termination extension surrounding the edge of a cathode or anode junction in a semiconductor substrate, where the junction termination extension has a controlled arbitrary lateral doping profile and a controlled arbitrary lateral width, are provided. A photosensitive material is illuminated through a photomask having a pattern of opaque and clear spaces therein, the photomask being separated from the photosensitive material so that the light diffuses before striking the photosensitive material. After processing, the photosensitive material so exposed produces a laterally tapered implant mask. Dopants are introduced into the semiconductor material and follow a shape of the laterally tapered implant mask to create a controlled arbitrary lateral doping profile and a controlled lateral width in the junction termination extension in the semiconductor.

Abstract: An integrated water sensor/actuator is based on a fibrous cellulosic material having anisotropic moisture-absorbing properties such that it's dried-in strain is greatest along one axis thereof. A plug of the dry and compressed fibrous cellulosic material has a powder material coated thereon and mixed therewith. The plug is compressed along it's axis of greatest dried-in strain and is fitted in a water-permeable housing adjacent a piston. The powder material is inert with respect to the cellulosic material and initiates a chemical reaction when exposed to water such that a product of the chemical reaction is water. Immersion of the housing in water causes expansion of the plug and corresponding movement of the piston.