Abstract: This is a thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, wherein the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.

Abstract: When current collecting wires are laid in parallel with each other on a solar cell on which a photosensitive film is formed, a wire tension adjusting mechanism is provided which includes a bobbin holder shaft pivotally held on the side of a frame in a bobbin cassette in a wiring apparatus and a wire bobbin is detachably fixed on the bobbin holder shaft. The wire tension adjusting mechanism further includes a pre-load means for adjusting the torque of the bobbin holder shaft and the tension of each current collecting wire to be drawn out from the wire bobbin held by the bobbin shaft is adjusted.

Abstract: A magnetron sputtering system generates a high density plasma on a target by applying magnetic fields intersecting an electric field by using a plurality of magnets that are rotatably supported. The respective magnets are revolved and rotated so that the time variation of regions where a magnetic field (line of magnetic force) generated by the each magnet is orthogonal to an electric field is prevented from becoming monotonous. Further, the respective magnets are arranged to make the distances between the center of rotation and the center of revolution of the respective magnets different from each other, so that the regions where the magnetic field (line of magnetic force) generated by the each magnet is orthogonal to the electric field are dispersed in the radial direction of a target.

Abstract: A sputtering system for depositing a thin film on the surface of a disc substrate in which high precision positioning of an inner mask and an outer mask is facilitated. The sputtering system has a mask member placed on the surface of the substrate mounted on a substrate holder to cover a partial region on the surface of the substrate. A thin film is deposited by sputtering in a region on the surface of the substrate not covered by the mask member. A section for carrying in and carrying out the substrate has mechanically holds and releases the substrate holder mounting the substrate, and mechanically holds and releases the mask member.

Abstract: A handler includes a device holding portion, which holds an uninspected device and loads the device in a measuring socket on a device tester, having a suction means for sucking the device by a very weak pushing force at the time of sucking the device from an uninspection tray and for loading the device in a measuring socket and also having a clamper capable of outputting a pushing force which can be changed at the time of the measurement contact. The device holding portion includes a position correcting mechanism for making a device position correction executed by an image recognizing and position correcting means.

Abstract: A solar cell module conveyer comprising an assembly line for intermittently feeding solar cells that constitute a solar cell module, and having machinery arranged for successively executing the working/treating steps; belt conveyers working as an inspection line which is synchronized with the assembly line to inspect the solar cell module fabricated on the assembly line through various working/treatment steps; and a transfer mechanism for transferring the solar cell module from the assembly line onto the belt conveyers.

Abstract: A device-positioning pedestal capable of positioning devices of different sizes. The device-positioning pedestal comprises a plurality of guide members corresponding to the sides of the device and coming in contact with the sides of the device to position the device, at least one guide member includes a slide mechanism that supports the guide member so as to slide relative to the device-positioning pedestal member and a fixing mechanism that fixes the guide members at desired positions. The guide members are set to be adapted to the size of the device by the guide member-adjusting means separate from the device-positioning pedestal. The guide member-adjusting means adjust the position of the guide members based on the size of the device measured by device size-measuring means separate from the guide member-adjusting means or based on the data of data-recording means attached to the device-positioning pedestal.

Abstract: When current collecting wires are laid in parallel with each other on a solar cell on which a photosensitive film is formed, a wire tension adjusting mechanism is provided which includes a bobbin holder shaft pivotally held on the side of a frame in a bobbin cassette in a wiring apparatus and a wire bobbin is detachably fixed on the bobbin holder shaft. The wire tension adjusting mechanism further includes a pre-load means for adjusting the torque of the bobbin holder shaft and the tension of each current collecting wire to be drawn out from the wire bobbin held by the bobbin shaft is adjusted.

Abstract: A handler includes a device holding portion, which holds an uninspected device and loads the device in a measuring socket on a device tester, having a suction means for sucking the device by a very weak pushing force at the time of sucking the device from an uninspection tray and for loading the device in a measuring socket and also having a clamper capable of outputting a pushing force which can be changed at the time of the measurement contact. The device holding portion includes a position correcting mechanism for making a device position correction executed by an image recognizing and position correcting means.

Abstract: A disk (6) is horizontally rotated a half-turn by a motor (7) in a rotational direction and, then, is rotated a half-turn in an opposite rotational direction. Two servomotors (8, 9) are symmetrically disposed, on an upper surface of the disk (6), with respect to a rotating shaft of the disk (6). Driving shafts (22, 23), driven by the two servomotors (8, 9), downwardly extend through the disk (6), and move hanging members (K, M), respectively, in upward-and-downward directions. Two hanging members (K, M) are provided, at their lower ends, with clampers (32), respectively. The clampers (32) are each provided, at their bottom surfaces, with a suction pad (35), and are provided, at their upper surfaces, with pneumatic cylinders (28, 29). The pressure of the compressed air supplied to the pneumatic cylinder is adjusted by a pressure regulating device (38).