Abstract: A hermetic housing is disclosed (10a) for an optoelectronic component (11) or a MEMS device configured to form an enclosure (12) within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window (14) transparent for at least one wavelength of interest (?); and a layer of a getter material (15a) configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1?P)*e_t<?/2?k with ? corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.
Type:
Grant
Filed:
September 27, 2019
Date of Patent:
April 19, 2022
Assignees:
LYNRED, UNIVERSITE PARIS-SACLAY CENTRE NATIONAL DE LA RECHERCHE, SCIENTIFIQUE (CNRS)
Inventors:
Sylvain Lemettre, David Bunel, Johan Moulin, Alain Bosseboeuf