Abstract: A high pressure discharge lamp, in which an anode and a cathode are disposed opposite each other in a bulb, achieves a long service life due to thorium (Th) being stably supplied to the cathode tip for a long time after lamp operation has been commence since the formation of the flicker phenomenon is suppressed over a long time due to the cathode being made of tungsten which contains thorium oxide on a surface space from the cathode tip, a carbide layer of tungsten carbide is formed and the cathode being bordered by an emitter containing body of tungsten which contains thorium dioxide, and a carbide layer of tungsten carbide being formed at least in a region bordering the cathode.

Abstract: To devise a light source device with a low price and from which a sufficient amount of light can be obtained, in a light source device having a reflector and a discharge lamp, a hermetically sealed portion of the lamp is directly joined to a part of a neck region of the reflector with a processed portion being formed for setting the positional relationship between the lamp and reflector.

Abstract: To provide a discharge lamp ignition device to light high-intensity discharge lamps in which, during alternating current ignition, the fluctuation of luminous flux on the reversal of polarity of the voltage impressed on the lamp is minimized and in which steady lighting characteristics of the discharge at startup are secured, a discharge lamp ignition device has a capacitor Ch connected to a transformer Th and an intermittent voltage impression arrangement Uj to drive voltage impression on the primary winding Ph, with the secondary winding Sh of the transformer Th constituted so that the voltage generated in the secondary winding Sh can be impressed overlapping the output voltage of an inverter Ui between the electrodes of the discharge lamp Ld by interposing it in the path connecting the output of the inverter Ui and the electrode for the main discharge of the discharge lamp Ld.

Abstract: To avoid the phenomenon of unsightly flickering in images projected by the projector, in high pressure discharge lamps—especially in high intensity discharge lamps, such as high pressure mercury lamps, metal halide lamps, and xenon lamps—that are used in projectors, even in the presence of the phenomenon of cyclical modulation of the lamp voltage by the returning the light spectrum when the light reflected by the dynamic color filter returns back through the optical system to the lamp, at least during steady operation of the discharge lamp (Ld), a target lamp current signal generation circuit (Up) acquires multiple lamp voltage detection signal (Sv) over a period that is at least as long as the color order cycle of the dynamic color filter (Of) and generates a target lamp current signal (St) based on the multiple lamp voltage detection signals (Sv) that were acquired.

Abstract: An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics 3a. Between them an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with laser . Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.

Abstract: A phototherapy device using excimer radiation in which, by skillful use of the individual peak wavelength of 308 nm and of the emission range of shorter wavelengths than 308 nm, the therapy effect is enhanced, and in which, at the same time, harm can be reduced is achieved using a XeCl excimer lamp and in which diseased sites of skin disorders are irradiated with UV-B radiation with an optical filter being used for changing the spectral shape of the UV-B radiation with which the diseased sites are irradiated.

Abstract: A light source device which can also advantageously control the growth of the projection using the DMD type is achieved in a light source device which has an ultrahigh pressure dicharge lamp) in which the silica glass discharge vessel is filled with greater than or equal to 0.15 mg/mm3 mercury and bromine; a feed device; an oval reflector; and a color wheel by the electrode on the side of the opening of the oval reflector of the discharge lamp having an increased diameter, and the relation 0./06<W/I2<0.96 between the volume W (mm3) of the tip area with increased diameter and the current value I being satisfied.

Abstract: To devise a heating device of the light irradiation type in which costs can reduced by reducing the number of filament lamps and current source parts without adversely affecting the illuminance distribution with respect to a wafer, in a heating device of the light irradiation type that has a light source part, in which several filament lamps are located parallel to one another, in which at least one of the filament lamps has several filaments which are located along the bulb axis are supplied with power individually to produce light which is irradiated from the light source parts onto an article to be treated, the distance between at least some of the adjacent filament lamps to one another is nonuniform.

Abstract: A filament lamp in which the article to be treated can be uniformly heated, and in which the disadvantage of poor sealing or the like does not arise even in the case of inserting a host of metal foils into a hermetically sealed portion is achieved in a filament lamp in the bulb of which there are several filament bodies, in which filaments and leads for supply of power to the filaments are connected to one another, and in which, on an end of the bulb, there is a hermetically sealed portion in which there is a rod-shaped sealing insulator on the periphery of which several electrically conductive components that are connected to the filaments are arranged spaced from one another.

Abstract: A short-arc ultra-high pressure mercury lamp in which the change in the shape of the electrodes can be suppressed and a stable arc discharge can always be produced is achieved in an arrangement in which, in the silica glass arc tube, there is a pair of opposed electrodes with a distance between them of at most 2 mm and the tube is filled with at least 0.15 mg/mm3 of mercury, a rare gas, and a halogen in the range from 1×10?6 ?mole/mm3 to 1×10?2 ?mole/mm3, by at least one of the electrodes having a melt part formed toward the electrode tip by winding the electrode rod with a coil and by melting the part of the coil oriented towards the electrode tip at least in the area of its surface. A part of the coil located away from the electrode tip is unmelted and the base point side area of the coil facing away from the electrode tip is rounded and does not have sharp edges.

Abstract: A light irradiation heating process in which, even in the case of an asymmetrical physical property of an article to be treated, uniform heating is possible, or in which heating can be performed such that the article acquires a desired physical property after heat treatment. Based on the measured value of the local physical property of the article to be treated, the emissivity distribution is obtained and the distribution pattern of the light intensity on the article to be treated is determined. According to this light intensity pattern, the individual intensity of the light emitted from respective light emitting parts of lamp units of the heating device are determined beforehand. According to this determined result, the intensity of the light emitted from the respective light emitting parts of the lamp units are controlled individually, and thus, the article to be treated is irradiated with light.

Abstract: To positionally stabilize the arc spot in a super-high pressure discharge lamp which is filled with at least 0.20 mg/mm3 of mercury and to prevent the formation of so-called flicker, in an operation device having a high pressure discharge lamp and a feed device, the feed device of the high pressure discharge lamp supplies a frequency in the range from 60 Hz to 1000 Hz as the stationary operating frequency and a low frequency, in a frequency range of from 5 Hz to 200 Hz is inserted which has an inserted length of from one half period to five periods, and an inserting period of from 0.01 seconds to 120 seconds, into the alternating current of the stationary operating frequency. Furthermore, the parameters of the low frequency are changed according to changes of the operating voltage of the discharge lamp.

Abstract: A microchip analysis device in which the effect of changes in the quantity of light of a discharge lamp of the short arc type can be reduced and measurement results with high reliability can be obtained is achieved in microchip measurement device which has a light source lamp and a lamp operating device, in which the light from the lamp is transmitted by a fill part for the liquid of the microchip to be tested, and in which the quantity of this transmitted light and based on the data obtained the decadic extinction of the liquid to be tested are measured, a device determines the fluctuation of the quantity of light from the light source lamp. Based on data from this device, a control interrupts or stops the detection of the quantity of the light transmitted by the microchip when the fluctuation is outside a preset range.

Abstract: An extreme UV radiation producing device in which adhesion of solid tin in the vacuum pump of an evacuation device is restricted, so that the maintenance period and the replacement period of the pump is prolonged is achieved by the provision of a treatment unit between a radiation source chamber and the evacuation device. The treatment device has a hydrogen radical producing part in which tin and/or a tin compound in the evacuated gas from the radiation source chamber is/are made into a tin hydride; and a heat treatment part in which the tin hydride is thermally decomposed and in which the tin produced liquefied and separated from the evacuated gas. The liquid tin is fed into a collecting/storage vessel and the evacuated gas from which the tin and/or a tin compound has been removed fed to the evacuation device.

Abstract: To devise a small light source device in which breaking of the bulb of the light source lamp can be suppressed and in which breaking of the bulb will not damage the window component, a light source lamp supported in a housing by only one of two hermetically sealed tubes at opposite ends of an arc tube, a cooling rib is mounted on a lead pin in the one of the sealed tubes that faces toward the window component and has a larger dimension in the radial direction than the maximum diameter of the opening edge of the light exit opening in the housing. The cooling rib serves to block bulb fragments and should it contact the peripheral edge area of the light exit opening with its edge that faces the window component, due to its size, neither the lead pin nor the cooling rib will contact the window component.

Abstract: An image reader of the stepping image reading type, by time division using a fluorescent lamp using a dielectric barrier discharge, in which for each divided image uniform lamp emission is always enabled and which can react advantageously especially when the image read rate increases is achieved by providing an image reader having a lighting part with a fluorescent lamp which use a dielectric barrier discharge and produces pulse emission and an inverter circuit which feeds this fluorescent lamp; a CCD line sensor which continuously receives the reflection light reflected by a manuscript and emitted by this fluorescent lamp, time-divided; and a controller which resets a divided image which is recognized by this CCD line sensor and which controls the timing of the start of recognition of the next divided image and which sends this timing signal to the inverter circuit as well, where the controller, within a given time in which the CCD line sensor recognizes a divided image of the manuscript, sends a flashing si

Abstract: An ultra-high pressure mercury lamp in which the tungsten comprising the electrodes is prevented from spraying during starting and operation, and blackening on the inside wall of the arc tube is prevented is achieved in that at least one of the electrodes has an axial part which is made essentially of tungsten and a starting part which is made essentially of tungsten, at least one of the axial part and of the starting part containing an electron emission material with a smaller work function than tungsten such that the value of S/A in mm2/% by weight is in the range 1?S/A?×104, S in mm2 designating the surface area of the part of the electrode projecting into the arc tube containing the electron emission material and A in % by weight indicating the concentration of the electron emission material in this part.

Abstract: An operating circuit for a discharge lamp having an external auxiliary electrode and main discharge electrodes in a discharge space, in which the disadvantage of lamp damage due to detachment of glass material, such as silica glass or the like, of a hermetically sealed portion of the discharge vessel from the electrode material in alternating current operation of a discharge lamp is prevented by a feed circuit having an inverter, and a trigger circuit for supply of a pulsed current to the primary winding of a high voltage transformer with an autotransformer arrangement for applying a high voltage to the auxiliary electrode in which the electrical potential of the trigger terminals is maintained essentially at the same electrical potential as the output line on the low voltage side of the feed circuit when the trigger circuit is inoperative.

Abstract: A device for operating a discharge lamp of the alternating current operating type has a high pressure discharge lamp with a silica glass discharge vessel in which a pair of opposed electrodes are located and on which a trigger electrode is located, a feed device which supplies an alternating discharge current to the high pressure discharge lamp, the feed device having a starter circuit, an inverter circuit with at least two switching devices; a coil which is located downstream of the inverter circuit and is series-connected to the discharge lamp; and a control element which produces on/off driving in alternation with a dead time, and in which the inductance of the coil is at most 210 ?H.

Abstract: To effectively eliminate radiation outside the band with a wavelength of 13.5 nm which has adverse effects on exposure without reducing the intensity of the EUV radiation with a wavelength of 13.5 nm, in an extreme UV radiation exposure tool which has an extreme UV radiation source device with an EUV focusing mirror which focuses extreme UV radiation and radiation outside the band which is emitted by the high density and high temperature region of a plasma, an illumination optical system for projecting this radiation onto a mask, and a projection optical system which projects the radiation from the mask onto a workpiece, a radiation shield is provided of a size which enables the radiation emerging from the EUV focusing mirror to be completely incident on it, and which has an opening of a size which results in essentially only extreme UV radiation being transmitted through it.