Abstract: An improved capacitance manometer includes a thin, electrically conductive diaphragm fixedly mounted to a housing. The diaphragm separates a first chamber that is subjected to a reference pressure from a second chamber that is subjected to a pressure that is to be measured relative to the reference pressure. The diaphragm flexes in response to a pressure differential between the two chambers. The diaphragm comprises one electrode of a variable capacitor. A second electrode of the variable capacitor is provided by a fixed electrically conductive area mounted on a ceramic disc or other fixed electrode support. The ceramic disc is mounted within the housing so that the electrically conductive area on the ceramic disc is proximate to and spaced apart from the diaphragm in generally parallel relationship to the diaphragm when the diaphragm is in a substantially relaxed condition (i.e., not flexed by a pressure differential).

Abstract: An apparatus and method control the pressure in a system by continuously measuring the pressure and comparing it to a desired set pressure. The apparatus and method record a history of the measured pressure as a function of time and calculate the rates at which the pressure changes. The rates at which the pressure changes are recorded and the rate at which the rates change is also calculated to determine the rate at which the apparatus and method can vary the rate of change of pressure. The apparatus and method calculate the amount of time required to reach the desired set pressure and compare it to the amount of time required for the rate of change of the pressure to become zero and adjust the flow of a gas in the system so that the desired set pressure is achieved at substantially the same time as the rate of pressure change becomes zero.