Patents Assigned to VEECO PROCESS EQUIPMENT INC.
  • Publication number: 20120223048
    Abstract: An inline processing system for patterning magnetic recording layers on hard discs for use in a hard disc drive. Discs are processed on both sides simultaneously in a vertical orientation, in round plate-like holders called MDCs. A plurality (as many as 10) discs are held in a dial carrier of the MDC, and transferred from one process station to another. The dial carrier of the MDC may be rotated and/or angled at up to 70° from normal in each process station, so that one or a plurality of process sources may treat the discs simultaneously. This configuration provides time savings and a reduction in the number and size of process sources needed. A mask enhancement process for patterning of magnetic media, and a filling and planarizing process used therewith, are also disclosed.
    Type: Application
    Filed: August 26, 2010
    Publication date: September 6, 2012
    Applicant: VEECO PROCESS EQUIPMENT INC.
    Inventors: Ajit Paranjpe, Todd A. Luse, Roger P. Fremgen, Narasimhan Srinivasan, Boris L. Druz, Katrina Rook, Adrian Celaru