Abstract: A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.
Type:
Grant
Filed:
October 10, 2008
Date of Patent:
September 10, 2013
Assignee:
VeraConnex, LLC
Inventors:
Sammy Mok, Frank Swiatowiec, Fariborz Agahdel