Abstract: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.

Abstract: A control plate for effecting superior shut-off in a proportional control valve comprises a moveable disk-shaped element that has a flat surface, generally perpendicular to the valve axis of symmetry when closed, and translates toward or away from an orifice surrounded by a narrow lip or orifice ridge. Enhanced leak tightness in the valve shut-off condition is achieved by selectively incorporating into the control plate materials that are softer than the material comprising the orifice ridge.

Abstract: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. Enhanced leak tightness in the valve shut-off condition may additionally be provided by selectively incorporating into the control plate materials softer than the material comprising the orifice ridge. The control plate is especially useful in high conductance, fast acting, and proportional control applications such as gas delivery in semiconductor manufacturing.

Abstract: A compact unitized mechanical linkage, which can be handled as a single piece within a valve top works, transmits force and motion of a piezoelectric actuator stack to a moveable element in a control valve. The linkage has few parts and all may be made at low cost.

Abstract: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. Enhanced leak tightness in the valve shut-off condition may additionally be provided by selectively incorporating into the control plate materials softer than the material comprising the orifice ridge. The control plate is especially useful in high conductance, fast acting, and proportional control applications such as gas delivery in semiconductor manufacturing.

Abstract: A compact unitized mechanical linkage, which can be handled as a single piece within a valve top works, transmits force and motion of a piezoelectric actuator stack to a moveable element in a control valve. The linkage has few parts and all may be made at low cost.

Abstract: A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.

Abstract: A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.

Abstract: A valve diaphragm processed by cold working a small concentric region of one surface has a permanent axisymmetric deformation. The deformed diaphragm can be used in a manner which causes continual elastic compression loading of the diaphragm material. The loading of the deformed diaphragm provides a valve restoring spring force and simultaneously defeats diaphragm tendency toward exhibiting hysteresis. The restoring force provided by the diaphragm can also lessen actuator hysteresis.

Abstract: A motion enhancing mechanism assembly suited for use with fluid control devices such as a piezoelectric modulating actuator of a proportional control valve. Range-limited axial motion of the actuator is transmitted through an amplifier disc to cause tilting of a control plate initially in sealing registration with an orifice ridge surrounding a fluid conduit aperture. Tilting of the control plate opens a wedge-like gap through which fluid may flow with larger conductance than is available with a planar gap of uniform height otherwise achievable with the range-limited motion of the actuator.

Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.

Abstract: A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.

Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.

Abstract: A compact, easily manufactured, axisymmetric mechanism can be configured to change the magnitude of a short-movement linear motion, or also reverse the movement direction, of an actuator for control of movable elements. The mechanism is bidirectional and reversible, functioning symmetrically, and does not contain any gears nor lead screw threads. It is constantly loaded, so that force change is achieved without mechanical backlash, introducing hysteresis. The movement conversion is generally proportional and suitable for use in actuating a fluid control valve intended for modulating the control of fluids.

Abstract: A malleable gasket suitable for high purity fluid delivery systems has flat axial end surface sealing regions on opposing sides, and further includes a raised inner lip on a first side and a raised outer lip on a second side. The raised lips align the gasket within a fluid delivery conduit by engaging features in the face of one or more fluid delivery elements joined together, and simultaneously provide protection to the sealing regions during normal handling and fluid delivery system assembly.

Abstract: A flow substrate including a body having a first surface and a second opposing surface, a plurality of ports defined in a first surface of the body, a plurality of apertures defined in a second surface of the body, a plurality of fluid pathways, each fluid pathway of the plurality of fluid pathways including a first segment extending between a respective aperture of the plurality of apertures and a first port of a respective pair of ports and a second segment extending between the respective aperture and a second port of the respective pair of ports, and at least one cap. The at least one cap has a first surface constructed to seal at least one aperture of the plurality of apertures, and a second opposing surface.

Abstract: A flow substrate including a body having a first surface and a second opposing surface, a plurality of pairs of ports defined in the first surface of the body, a plurality of fluid pathways extending between each respective pair of ports and in fluid communication with each port of the respective pair of ports, and at least one cap. Each fluid pathway is formed in the second surface of the body. The at least one cap has a first surface constructed to seal at least one fluid pathway, and a second opposing surface. At least one of the body and the at least one cap includes a weld formation formed in at least one of the second surface of the body and the second surface of the at least one cap constructed to surround the at least one fluid pathway and facilitate welding of the at least one cap to the body along the weld formation.

Abstract: A flow substrate including a body having a first surface and a second opposing surface, a plurality of pairs of ports defined in the first surface of the body, a plurality of fluid pathways extending between each respective pair of ports and in fluid communication with each port of the respective pair of ports, and at least one cap. Each fluid pathway is formed in the second surface of the body. The at least one cap has a first surface constructed to seal at least one fluid pathway, and a second opposing surface. At least one of the body and the at least one cap includes a weld formation formed in at least one of the second surface of the body and the second surface of the at least one cap constructed to surround the at least one fluid pathway and facilitate welding of the at least one cap to the body along the weld formation.