Patents Assigned to Wollmann Engineering, Inc.
  • Wafer carrier transport system interface
    Patent number: 4723799
    Abstract: The invention comprises a two, three or four short pin engagement system for engaging a wafer carrier for transporting semiconductor wafers by means of a three axis robotic transportation system for the purpose of processing semiconductor wafers in a factory. The multiple pin assembly allows a large reduction in travel distance with respect to prior art long rod engagement supports.
    Type: Grant
    Filed: September 13, 1985
    Date of Patent: February 9, 1988
    Assignee: Wollmann Engineering, Inc.
    Inventors: Andrew F. Wollmann, Donald A. Wessel