Abstract: A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Abstract: A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Abstract: Sensors for determining the ambient amount (e.g., concentration) of a chemical (e.g., molecular hydrogen in a gas or vapor) are disclosed. Preferred embodiments of these sensors comprise a dense thin metal (e.g., palladium or a palladium alloy) film disposed on a microcantilever beam that is suspended above a stationary baseplate. The dense thin metal film is configured to absorb, for example, hydrogen, thereby causing the film to expand which in turn causes the microcantilever beam to deform. The deformation can be measured, for example, as a change in capacitance between the microcantilever beam and the stationary baseplate. The measured change in capacitance is indicative of the ambient hydrogen concentration.

Abstract: A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Abstract: A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Abstract: A system that includes a container containing a fluid, a fluid line coupled with the container, and a pump configured to pump the fluid out of the container through the fluid line. The system further includes a sensor that includes a wireless transmitter. The sensor is configured to sense the pressure in the fluid line and to periodically transmit, using the wireless transmitter, an alarm message when the pressure reaches an alarm threshold.

Abstract: A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

Abstract: A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

Abstract: A system comprises a pressurized container configured to hold a pressurized gas and to supply controlled amounts of the pressurized gas to the system as required. The system also includes a sensor that includes a wireless transmitter. The sensor is configured to sense the pressure in the pressurized container and to periodically transmit, using the wireless transmitter, information related to the pressure in the pressurized container. The system also includes a control unit that includes a wireless receiver configured to receive the information transmitted by the sensor. The control unit is further configured to predict based on the received information when the pressure in the pressurized container will reach a predetermined threshold.