Abstract: The intent of this invention is to provide an apparatus for substrate transportation that is to carry the substrate without any mechanical contact when the substrate is required to be transported in various manufacturing processes including semiconductor, display and the like.

Abstract: The intent of this invention is to provide an apparatus for substrate transportation that is to carry the substrate without any mechanical contact when the substrate is required to be transported in various manufacturing processes including semiconductor, display and the like.

Abstract: Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a rectangular post-shaped crucible with an open top face; and a nozzle having a body portion having a rectangular post-like shape with a height smaller than that of the crucible and assembled to an upper portion of the crucible, and a plurality of evaporation tubes penetrating through the body portion between top and bottom faces of the body portion. The evaporation tubes are divided into four groups of which evaporation tubes are inclined toward respective four corners of a top face of the nozzle unit.

Abstract: Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a rectangular post-shaped crucible with an open top face; and a nozzle having a body portion having a rectangular post-like shape with a height smaller than that of the crucible and assembled to an upper portion of the crucible, and a plurality of evaporation tubes penetrating through the body portion between top and bottom faces of the body portion. The evaporation tubes are divided into four groups of which evaporation tubes are inclined toward respective four corners of a top face of the nozzle unit.

Abstract: Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a cylindrical or rectangular post-shaped crucible 31 or 51 with an open top face; and a nozzle unit 32 having a body portion having a cylindrical or rectangular post-like shape with a height smaller than that of the crucible 31 or 51 and assembled to an upper portion of the crucible, and a plurality of evaporation tubes formed at an angle while penetrating through the body portion between top and bottom faces of the body portion. An evaporated material spouts toward peripheral areas of a substrate due to the inclined evaporation tubes, thereby improving the uniformity of a thin film to be deposited and the efficiency of use of the evaporated material, and preventing condensation of the evaporated material at a spouting portion.

Abstract: Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a cylindrical or rectangular post-shaped crucible 31 or 51 with an open top face: and a nozzle unit 32 having a body portion having a cylindrical or rectangular post-like shape with a height smaller than that of the crucible 31 or 51 and assembled to an upper portion of the crucible, and a plurality of evaporation tubes formed at an angle while penetrating through the body portion between top and bottom feces of the body portion. An evaporated material spouts toward peripheral areas of a substrate due to the inclined evaporation tubes, thereby improving the uniformity of a thin film to be deposited and the efficiency of use of the evaporated material and preventing condensation of the evaporated material at a spouting portion.

Abstract: The present invention relates to an evaporator for vacuum thermal evaporation, and more particularly, to an evaporator having multi-layered conical slit nozzles, which can form a large-area uniform thin film and improve the efficiency of use of a material to be deposited. The evaporator includes a cylindrical crucible 110 with an open top face, and a nozzle unit 120 having a cylindrical body portion 121 assembled to the top face of the crucible 110, wherein the body portion 121 is provided with multi-layered conical slits 122 formed at an upper periphery of the body portion 121 while being bored through the body portion, and an evaporation tube 123 connected to the slits 122 while penetrating through a lower face of the body portion 121. The multi-layered conical slit nozzles provide a spouting distribution of a material to be deposited, which can increase the thickness uniformity of a deposited thin film and improve the efficiency of use of the material to be deposited.