Abstract: A substrate processing apparatus of the invention has a self-propelled carrying mechanism 15 configured to enable a processing target substrate W to be carried to/from each of liquid processing apparatuses HB, COT and DEV where at least two liquid processing apparatuses W are linearly disposed and to be movable in parallel with an arrangement direction of the liquid processing apparatuses HB, COT and DEV, substrate delivering/receiving mechanism 20 and 21 configured to enable the processing target substrate W to be delivered and received to/from the self-propelled carrying mechanism 15, and a non-self-propelled carrying mechanism 10 configured to enable the processing target substrate to be delivered and received to/from the substrate delivering/receiving mechanisms 20 and 21.