Abstract: A beam processor for processing a work surface of a workpiece W by irradiating the work surface with a beam, includes: an output source for outputting the beam, a beam moving device for moving the beam output from the output source; and a plurality of reflectors disposed on an optical path of the beam between the beam moving device and the work surface for reflecting the beam moved by the beam moving device and conducting the beam to the work surface, wherein the plurality of reflectors is inclined a predetermined angle corresponding to an incident direction of the beam so that the beam moved by the beam moving device is conducted nearly vertically to a different position of the work surface.

Abstract: A device for checking sheet packaging, whereby all the defects of packaged articles or sheets are easily and highly accurately detected based on the density or color distribution of reflection and transmission images. Defects such as deformation, discoloration, foreign matters and contamination of an article (16) packaged with a sheet and the sheet are detected by forming a density distribution code image or color code distribution image or by executing inter-image calculation based on a reflection image, a transmission image, or density or color images thereof. The upper and lower light sources are simultaneously turned on to separately form a reflection image and a transmission image from the input image in order to enhance the checking efficiency. Furthermore, a reflector (17) is disposed under a packaging sheet to enhance image contrast and to improve checking efficiency and stability. Optimum conditions for the kind and position of the reflector are clarified.