Abstract: The present invention provides an ESD protection device with isolated islands and an n well. At least one of the isolated islands has an end apart from the boundary of a drain diffusion region of the ESD protection device, to form a gap between. The n well overlaps with the isolated islands and is kept at least a designated distance away from a channel region of the ESD protection device. An interlocked structure of isolated islands is also provided in this invention to direct ESD current flowing forward and backward to the channel region of the ESD protection device, thereby increasing the distributed resistance of the drain diffusion region. Several benefits, such as lower drain capacitance, lower standby power consumption and a wider range of adjustable resistance, are achieved.

Abstract: A method for making a thin film of solid material, including bombarding one face of a substrate of the solid material with at least one of rare gas ions and hydrogen gas ions so as to create a layer of microcavities seperating the substrate into two regions at a depth neighboring the average ion penetration depth, and heating the layer of microcavities to a temperature sufficient to bring about a separation between the two regions of the substrate. The solid material includes one of a dielectric material, a conducting material, a semi-insulating material, and an unorganized semiconducting material.