Abstract: FinFET devices and processes to prevent fin or gate collapse (e.g., flopover) in finFET devices are provided. The method includes forming a first set of trenches in a semiconductor material and filling the first set of trenches with insulator material. The method further includes forming a second set of trenches in the semiconductor material, alternating with the first set of trenches that are filled. The second set of trenches form semiconductor structures which have a dimension of fin structures. The method further includes filling the second set of trenches with insulator material. The method further includes recessing the insulator material within the first set of trenches and the second set of trenches to form the fin structures.

Abstract: A cooling structure includes a first substrate layer including an array of cooling channels, a second substrate layer including a nozzle structure, an outlet manifold, and an outlet, a third substrate layer including an inlet, and inlet manifold, and one or more flow directing features are disposed within the inlet manifold. The one or more flow directing features include one or more micro-pillars extending into the cooling fluid flow path from the inlet manifold, the first substrate layer includes one or more first substrate layer through-holes, the second substrate layer includes one or more second substrate layer-through holes, and the third substrate layer includes one or more third-substrate layer through holes. The first substrate layer through-holes, the second substrate layer through-holes, and the third substrate layer through-holes are aligned into one or more TSVs and metallized.

Abstract: An approach to deposit, by a self-aligning process, a layer of graphene on a gate formed on a dielectric layer on a semiconductor substrate where the gate includes a metal catalyst material. The approach includes removing a portion of the dielectric layer and a portion of the semiconductor substrate not under the gate and depositing, by a self-aligning atomic layer deposition process, a layer of a material capable of creating a source and a drain in a semiconductor device on exposed surfaces of the semiconductor substrate and the dielectric layer. The approach includes removing the layer of graphene from the gate, and, then removing a portion of the layer of the material capable of creating the source and the drain in the semiconductor device.

Abstract: A memory device includes a substrate and a stacked body arranged along a first direction. The stacked body includes electrode films. A configuration of an end portion in a second direction of the stacked body is a staircase configuration. Steps corresponding to the electrode films are formed in the staircase configuration. A first distance between a first step and an end edge of the stacked body in the second direction is shorter than a second distance between a second step and the end edge in the second direction. The first step is positioned at an end portion in a third direction of the stacked body. The second step is positioned at a central portion in the third direction of the stacked body. The first and second steps correspond to two of the electrode films positioned at the same level when counting along the first direction from the substrate side.

Abstract: A method of forming a semiconductor device structure comprises forming a stack structure comprising stacked tiers. Each of the stacked tiers comprises a first structure comprising a first material and a second structure comprising a second, different material longitudinally adjacent the first structure. A patterned hard mask structure is formed over the stack structure. Dielectric structures are formed within openings in the patterned hard mask structure. A photoresist structure is formed over the dielectric structures and the patterned hard mask structure. The photoresist structure, the dielectric structures, and the stack structure are subjected to a series of material removal processes to form apertures extending to different depths within the stack structure. Dielectric structures are formed over side surfaces of the stack structure within the apertures. Conductive contact structures are formed to longitudinally extend to bottoms of the apertures.

Abstract: FinFET devices and processes to prevent fin or gate collapse (e.g., flopover) in finFET devices are provided. The method includes forming a first set of trenches in a semiconductor material and filling the first set of trenches with insulator material. The method further includes forming a second set of trenches in the semiconductor material, alternating with the first set of trenches that are filled. The second set of trenches form semiconductor structures which have a dimension of fin structures. The method further includes filling the second set of trenches with insulator material. The method further includes recessing the insulator material within the first set of trenches and the second set of trenches to form the fin structures.

Abstract: A method of forming an interconnection structure includes forming a dielectric structure over a non-insulator structure; forming a hole in the dielectric structure to expose the non-insulator structure; forming a first diffusion barrier layer into the hole in the dielectric structure using a first deposition process; forming a second diffusion barrier layer over the first diffusion barrier layer using a second deposition process that is different from the first deposition process; and forming a metal over the second diffusion barrier layer.

Abstract: An avalanche photodiode (APD) array with reduced cross talk comprises, in the illustrative embodiment, a 2D array of Geiger-mode APDs, wherein a via is formed through the backside (substrate) of each APD in the array.

Abstract: A semiconductor device includes a type IV semiconductor base substrate, a first type III-V semiconductor layer formed over the base substrate, a second type III-V semiconductor layer formed over the first type III-V semiconductor layer. A two-dimensional charge carrier gas forms at an interface between the first and second type III-V semiconductor layers. First and second electrically conductive device terminals are in ohmic contact with the two-dimensional charge carrier gas. A gate electrode is formed on the first type III-V semiconductor layer and is configured to control a conduction state of the two-dimensional charge carrier gas. An electrically insulating region is disposed over the second type III-V semiconductor layer and is laterally between the gate electrode and the second electrically conductive device terminal. At least one diode is formed on the electrically insulating region and is electrically connected between the gate electrode and the second electrically conductive device terminal.

Abstract: A semiconductor device includes active fins on a substrate. Gate lines each extend in the second direction on the active fins. A contact plug is positioned on the active fins. A first via is in one of the first contact plugs. A first conductive line overlaps a first via. A first distance from a first active fin on which a first gate line of the gate lines is formed to an end of the first gate line is more than a predetermined distance. A second distance from a second active fin on which the first gate line is formed to the first active fin of the active fins is equal to or less than the predetermined distance. The second active fin is spaced apart from the first contact plugs to not overlap the first contact plugs.

Abstract: An optoelectronic semiconductor component and a method for producing the same are disclosed. In an embodiment the semiconductor component includes a semiconductor chip, which emits electromagnetic radiation of a first wavelength range from a radiation emission surface. The semiconductor component further includes a first conversion layer located on a lateral flank of the semiconductor chip, wherein the first conversion layer is suitable for converting electromagnetic radiation of the first wavelength range into electromagnetic radiation of a second wavelength range, and a second conversion layer located on the radiation emission surface of the semiconductor chip, wherein the second conversion layer is suitable for converting electromagnetic radiation of the first wavelength range into electromagnetic radiation of the second or of a third wavelength range. The first conversion layer is different from the second conversion layer.

Abstract: An electrostatic discharge (ESD) device includes an active region. The active region includes a first active line having a first plurality of gate features; and a second active line having a second plurality of gate features. The ESD device further includes a first pick-up line having a third plurality of gate features, wherein the first active line is between the first pick-up line and the second active line. The ESD device further includes a second pick-up line comprising a fourth plurality of gate features, wherein the second active line is between the second pick-up line and the first active line.

Abstract: A semiconductor device including a first P-type well region and an asymmetric second P-type well region each formed in a semiconductor substrate; a gate insulating layer and a gate electrode formed on the substrate; a first N-type source/drain region and a second N-type source/drain region that are formed on respective sides of the gate electrode; and an asymmetric LDD region of N-type formed to extend from the second source/drain region, wherein the asymmetric second P-type well region encompasses the second N-type source/drain region and the asymmetric LDD region, and the first N-type source/drain region both the asymmetric second P-type well region and the substrate, and the asymmetric second P-type well region is formed encompassing the second N-type source/drain region and in contact with the first N-type source/drain region.

Abstract: After a sputtering gas is supplied to a deposition chamber, plasma including an ion of the sputtering gas is generated in the vicinity of a target. The ion of the sputtering gas is accelerated and collides with the target, so that flat-plate particles and atoms of the target are separated from the target. The flat-plate particles are deposited with a gap therebetween so that the flat plane faces a substrate. The atom and the aggregate of the atoms separated from the target enter the gap between the deposited flat-plate particles and grow in the plane direction of the substrate to fill the gap. A film is formed over the substrate. After the deposition, heat treatment is performed at high temperature in an oxygen atmosphere, which forms an oxide with a few oxygen vacancies and high crystallinity.

Abstract: A display substrate, an Organic Light Emitting Diode (OLED) display device and a manufacturing method for the display substrate. The display substrate includes a plurality of pixel units located on a substrate and filter functional units corresponding to the pixel units. Each filter functional unit includes at least three micro-cavity structures, wherein the cavity lengths of the three micro-cavity structures in the direction of a vertical substrate are different, only light with a specific wavelength can penetrate through the micro-cavity structures with different cavity lengths, and the cavity lengths of micro-cavity structures corresponding to similar sub-pixel units of the pixel units are the same.

Abstract: Devices and methods for forming semiconductor devices with self aligned contacts for improved process windows are provided. One method includes, for instance: obtaining a wafer with at least two gates, forming partial spacers adjacent to the at least two gates, and forming at least one contact on the wafer. One intermediate semiconductor device includes, for instance: a wafer with an isolation region, at least two gates disposed on the isolation region, at least one source region disposed on the isolation region, at least one drain region disposed on the isolation region, and at least one contact positioned between the at least two gates, wherein a first portion of the at least one contact engages the at least one source region or the at least one drain region and a second portion of the at least one contact extends above a top surface of the at least two gates.

Abstract: One example includes a semiconductor device. The semiconductor device include a carbon nanotube substrate, a self-assembled monolayer, and a gate oxide. The self-assembled monolayer overlies the carbon nanotube substrate and is comprised of molecules each including a tail group, a carbon backbone, and a head group. The gate oxide overlies the self-assembled monolayer, wherein the self-assembled monolayer forms an interface between the carbon nanotube substrate and the gate oxide.

Abstract: A variable resistive memory device includes a first electrode layer, a variable resistive pattern structure located on the first electrode layer and including a variable resistive layer, a capping layer formed on opposite side walls of the variable resistive pattern structure and including regions having different impurity concentrations, and a second electrode layer formed on the capping layer.

Abstract: An antifuse is provided that is embedded in a semiconductor substrate. The antifuse has a large contact area, and a reduced breakdown voltage. After blowing the antifuse, the antifuse has a low resistance. The antifuse may have a single breakdown point or multiple breakdown points. The antifuse includes a metal or metal alloy structure that is separated from a doped semiconductor material portion of the semiconductor substrate by an antifuse dielectric material liner. The metal or metal alloy structure and the antifuse dielectric material liner have topmost surfaces that are coplanar with each other as well as being coplanar with a topmost surface of the semiconductor substrate.

Abstract: A method for manufacturing a semiconductor device, including forming a dummy gate structure on a substrate, in which the substrate has a source/drain portion and a channel portion adjacent to the source/drain region, and the dummy gate structure is formed on the channel portion of the substrate; recessing at least a part of the source/drain portion to form a recess in the source/drain portion of the substrate; forming a stress material in the recess; replacing the dummy gate structure with a gate stack; removing the stress material in the recess after the replacing the dummy gate structure with the gate stack; and forming an epitaxy structure in the recess.