Patents Examined by Brooke Purinton
  • Patent number: 11340200
    Abstract: A spray-capillary device is configured to process ultra low-volume samples. The spray-capillary device includes a spray capillary that includes an inlet end and a discharge end. The spray capillary includes a porous section at the discharge end. A downstream connector provides an interface between the porous section of the spray capillary, a conductive fluid, and a high voltage electrical source. The application of voltage to the downstream connector causes electrospray ionization, which can be used to draw ultra law volume samples into the inlet end. A gas injection assembly can be used to increase the pressure on the inlet end of the spray capillary to encourage movement of the sample through the spray capillary. The spray-capillary device is well suited for providing ultra low samples to a mass spectrometer detection device.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: May 24, 2022
    Assignee: The Board of Regents of the University of Oklahoma
    Inventors: Si Wu, Lushuang Huang, Zhe Wang
  • Patent number: 11293940
    Abstract: A sensor device includes a carrier, a force feedback sensor, and a probe containing a spin defect, the probe being connected to the force feedback sensor either directly or indirectly via a handle structure. In order to couple the spin defect to a microwave field in an efficient and robust manner, the sensor device includes an integrated microwave antenna arranged at a distance of less than 500 micrometers from the spin defect. The sensor device can be configured as a self-contained exchangeable cartridge that can easily be mounted in a sensor mount of a scanning probe microscope.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: April 5, 2022
    Assignee: ETH Zurich
    Inventors: Christian Degen, Jens Boss, Kevin Chang, Jan Rhensius
  • Patent number: 11282685
    Abstract: A tuning system may acquire, from a mass spectrometer during a batch of one or more analytical runs performed with the mass spectrometer, tune data associated with an operating characteristic of the mass spectrometer. The tuning system may determine, based on the tune data, a value of an operating parameter configured to adjust the operating characteristic of the mass spectrometer and set the operating parameter to the determined value.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: March 22, 2022
    Assignee: THERMO FINNIGAN LLC
    Inventors: Scott T. Quarmby, Giacinto Zilioli, Charles H. Vogt, Dustin J. Kreft, Nathaniel L. Sanders, George B. Guckenberger, John G. Voss
  • Patent number: 11276505
    Abstract: A light-weight radiation protection panel comprising radiation protection layer and a flexible material. The radiation protection layer comprises a plurality of a shielding material distributed in repeated and adjacent units of geometrical shapes, the light-weight radiation protection panel being able to be embodied in a wearable garment providing flexibility.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: March 15, 2022
    Assignee: StemRad Ltd.
    Inventors: Oren Milstein, Gideon Waterman, Meytal Baron, Tamar Nix, Payal Jain
  • Patent number: 11270864
    Abstract: Disclosed herein are approaches for adjusting extraction slits of an extraction plate using a set of adjustable beam blockers. In one approach, an ion extraction optics may include an extraction plate including a first opening and a second opening, and a first beam blocker extending over the first opening and a second beam blocker extending over the second opening. Each of the first and second beam blockers may include an inner slit defined by a first distance between an inner edge and the extraction plate, and an outer slit defined by a second distance between an outer edge and the extraction plate, wherein the first and second beam blockers are movable to vary at least one of the first distance and the second distance. As a result, extraction through the inner and outer slits of ion beamlets characterized by similar mean angles may be achieved.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: March 8, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Costel Biloiu, Adam Calkins, Alexander C. Kontos, James J. Howarth
  • Patent number: 11264220
    Abstract: A method for producing an atom trap (20) comprising the steps: (a) applying an electrically conductive starting layer (2) onto a substrate (1), (b) applying at least one electric conductor element (4) to the starting layer (2) by means of electro-chemical deposition and/or a lift-off method, (c) applying at least one contacting element (6) by means of electro-chemical deposition and/or a lift-off method, such that the at least one contacting element (6) is connected to the at least one electric conductor element (4) in an electrically conductive manner, (d) removing the starting layer (2) in regions in which no electric conductor element (4) has been applied, (e) applying an insulation layer (7) that at least partially covers the at least one electric conductor element (4) and the at least one contacting element (6), (f) planarizing the insulation layer (7) and exposing the at least one contacting element (6), and (g) applying at least one additional electric conductor (14) element by means of electro-chemica
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: March 1, 2022
    Assignee: Bundesrepublik Deutschland, vertreten durch das Bundesministerium fuer Wirtschaft und Energie, dieses vertreten durch den Praesidenten der Physikalisch-Technischen Bundesanstalt
    Inventors: Amado Bautista-Salvador, Christian Ospelkaus, Martina Wahnschaffe, Jonathan Morgner
  • Patent number: 11264206
    Abstract: Methods for fracturing or mask data preparation are disclosed in which a set of single-beam charged particle beam shots is input; a calculated image is calculated using a neural network, from the set of single-beam charged particle beam shots; and a set of multi-beam shots is generated based on the calculated image, to convert the set of single-beam charged particle beam shots to the set of multi-beam shots which will produce a surface image on the surface. Methods for training a neural network include inputting a set of single-beam charged particle beam shots; calculating a set of calculated images using the set of single-beam charged particle beam shots; and training the neural network with the set of calculated images.
    Type: Grant
    Filed: October 17, 2019
    Date of Patent: March 1, 2022
    Assignee: D2S, Inc.
    Inventors: Akira Fujimura, Thang Nguyen, Ajay Baranwal, Michael J. Meyer, Suhas Pillai
  • Patent number: 11257657
    Abstract: A method of operating a charged particle beam device is disclosed, including focusing a charged particle beam onto a sample with an objective lens assembly; passing a reflected light beam through a bore of the objective lens assembly to an interferometer; and interferometrically determining a z-position of the sample with the interferometer. A charged particle beam device is disclosed, including a charged particle beam generator which has a charged particle source. A charged particle path for the charged particle beam extends through a bore of an objective lens assembly toward a sample stage. An interferometer is arranged to receive a reflected light beam which passes through the bore of the objective lens assembly.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: February 22, 2022
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: John Breuer, Rony Reuveni, Alexander Goldenstein
  • Patent number: 11243156
    Abstract: Aspects of the invention include determining, by a first AFM tip, a first snap-off force of a solid surface immersed in a first fluid, determining, by a second AFM tip, a second snap-off force, determining, by a third AFM tip, a third snap-off force, determining, by the first AFM tip, a fourth snap-off force of a droplet of the first fluid immersed in the second fluid on the solid surface, determining, by the second AFM tip, a fifth snap-off force, determining, by the third AFM tip, a sixth snap-off force, determining a first capillary force for first AFM tip and first droplet based on first snap-off force and fourth snap-off force, determining a second capillary force for second AFM tip and first droplet and a third capillary force for third AFM tip and first droplet, and determining interfacial tension between first fluid and second fluid based on the capillary forces.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: February 8, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael Engel, Filipe Viana Ferreira, Rodrigo Neumann Barros Ferreira, Ronaldo Giro, Mathias Steiner
  • Patent number: 11239001
    Abstract: A method for generating extreme ultraviolet (EUV) radiation includes introducing a fuel droplet; applying a first laser beam to strike the fuel droplet at a location to generate EUV radiation and form a movable debris of the fuel droplet; and forming an energy field proximal to the location of the first laser beam strike to trap the movable debris. An EUV radiation source includes a fuel droplet generator, a first laser, a collector and an energy field. The fuel droplet generator is configured to provide a fuel droplet. The first laser is configured to generate a first laser beam to strike the fuel droplet at a location to generate EUV radiation and form a movable debris. The collector is configured to reflect the EUV radiation. The energy field is configured to trap the movable debris, wherein the energy field is proximal to the location of the first laser beam strike.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: February 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD
    Inventors: Tzu Han Liu, Chih-Wei Wen, Chung-Hung Lin
  • Patent number: 11226285
    Abstract: System and Methods may be provided for performing chemical spectroscopy on samples from the scale of nanometers with surface sensitivity even on very thick sample. In the method, a signal indicative of infrared absorption of the surface layer is constructed by illuminating the surface layer with a beam of infrared radiation and measuring a probe response comprising at least one of a resonance frequency shift and a phase shift of a resonance of a probe in response to infrared radiation absorbed by the surface layer.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: January 18, 2022
    Assignee: Bruker Nano, Inc.
    Inventors: Kevin Kjoller, Craig Prater
  • Patent number: 11227754
    Abstract: A low power mass spectrometer assembly includes at least an ionization component, an electrostatic analyzer, a lens assembly, a magnet assembly and at least one detector located in a same plane as the entrance to the magnet assembly for detecting the deflected sample ions and/or fragments of sample ions, including ions or ion fragments indicative of the Vitamin D metabolite within the sample.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: January 18, 2022
    Assignee: Leidos, Inc.
    Inventor: Noah Peter Christian
  • Patent number: 11222778
    Abstract: An electrospray ion source for a mass spectrometer comprises: (i) a plurality of N electrospray emitters within an ionization compartment, wherein N?2; (ii) a mixing chamber; (iii) a plurality of N inlets, each inlet comprising a conduit configured to receive charged particles from a respective one of the electrospray emitters and to emit the charged particles into the mixing chamber; (iv) an outlet port either facing or within an intermediate-vacuum compartment; and (v) a heater in thermal contact with at least a portion of the mixing chamber.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: January 11, 2022
    Assignee: THERMO FINNIGAN LLC
    Inventors: Viatcheslav V. Kovtoun, Eloy R. Wouters
  • Patent number: 11207039
    Abstract: A radiation shield assembly is described, configured to block radiation emanating from a radiation source from reaching a user. Two shields are supported by a support arm, and are configured to rotate and translate relative to one another about the support arm's longitudinal axis. This allows the shield to be easily configured and reconfigured as necessary to visualize various parts of a patients body via radiography.
    Type: Grant
    Filed: August 10, 2018
    Date of Patent: December 28, 2021
    Assignee: Intervention for Life, LLC
    Inventors: Robert Evans Foster, Lloyd Guyton Bowers Cooper, William Thomas Livingston, Foster D Phillips
  • Patent number: 11205558
    Abstract: A sample exchange device includes a first transport mechanism that includes a grip portion that grips a sample holding member and transports a sample holding member to a sample exchange chamber, a cooling unit that cools the sample exchange chamber, fiber sensors that detect whether or not the grip portion of the first transport mechanism grips the sample holding member in the sample exchange chamber, and a control unit. The control unit turns on the fiber sensors when the grip portion of the first transport mechanism enters the sample exchange chamber and turns off the fiber sensors after it is detected whether or not the grip portion of the first transport mechanism grips the sample holding member.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: December 21, 2021
    Assignee: JEOL Ltd.
    Inventors: Naoki Fujimoto, Kimitaka Hiyama
  • Patent number: 11160889
    Abstract: The purpose of the present invention is to provide an ultraviolet sterilization device that can increase the ultraviolet irradiance near the center of a treatment flow path even at a position far from a light emitting element. This ultraviolet sterilization device comprises: a flow path tube having a linear treatment flow path therein; a light emitting element for emitting ultraviolet rays; and a reflector having a reflection surface for reflecting ultraviolet rays emitted from the light emitting element and collecting and directing the ultraviolet rays to the flow path tube. The ultraviolet sterilization device irradiates a fluid flowing in the linear treatment flow path with ultraviolet rays and sterilizes the fluid.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: November 2, 2021
    Assignee: Enplas Corporation
    Inventor: Masato Nakamura
  • Patent number: 11127564
    Abstract: An immersion objective lens is configured below a stage such that multiple detectors can be configured above sample for large beam current application, particularly for defect inspection. Central pole piece of the immersion objective lens thus can be provided that a magnetic monopole-like field can be provided for electron beam. Auger electron detector thus can be configured to analyze materials of sample in the defect inspection.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: September 21, 2021
    Assignee: KKT HOLDINGS SYNDICATE
    Inventors: Tzu-Yi Kuo, Yu-Kuang Tseng
  • Patent number: 11126087
    Abstract: A component for a mirror array for EUV lithography, particularly for use in faceted mirrors in illumination systems of EUV lithography devices. A component (500) for a mirror array for EUV lithography is proposed which is at least partially made from a composite material including matrix material (502) that contains copper and/or aluminium, and reinforcing material in the form of fibers (504). The composite material also includes particles (508) that consist of one or more of the materials from the group: graphite, adamantine carbon, and ceramic.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: September 21, 2021
    Assignee: CARL ZEISS SMT GMBH
    Inventor: Eric Eva
  • Patent number: 11120969
    Abstract: A scanning electron microscopy system with improved image beam stability is disclosed. The system includes an electron beam source configured to generate an electron beam and a set of electron-optical elements to direct at least a portion of the electron beam onto a portion of the sample. The system includes an emittance analyzer assembly. The system includes a splitter element configured to direct at least a portion secondary electrons and/or backscattered electrons emitted by a surface of the sample to the emittance analyzer assembly. The emittance analyzer assembly is configured to image at least one of the secondary electrons and/or the backscattered electrons.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: September 14, 2021
    Assignee: KLA Corporation
    Inventors: Doug K. Masnaghetti, Gabor Toth, David Trease, Rohit Bothra, Grace Hsiu-Ling Chen, Rainer Knippelmeyer
  • Patent number: 11119070
    Abstract: A system for analyzing a sample includes a source; a mobility separator configured to separate ions based on a mobility in a gas; a plurality of ion channels; and a mass analyzer. The mobility separator includes a two-dimensional grid of electrodes spanning a passage between first and second walls. The first and second walls include an inlet aperture and a plurality of exit apertures, respectively. The two-dimensional grid of electrodes configured to generate an electric field within the passage. The plurality of ion channels arranged adjacent to the plurality of exit apertures. Movement of ions between the inlet aperture and the plurality of exit apertures are governed by the electric field and a gas flow through the passage between to the first and second walls such that the ions are sorted and directed to different channels based on their respective mobility.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: September 14, 2021
    Assignee: THERMO FINNIGAN LLC
    Inventor: Mikhail V. Ugarov