Patents Examined by Cassandra Spy
  • Micro machined mirror
    Patent number: 6315423
    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
    Type: Grant
    Filed: July 13, 1999
    Date of Patent: November 13, 2001
    Assignee: Input/Output, Inc.
    Inventors: Duli Yu, Lianzhong Yu, Howard D. Goldberg, Martin A. Schmidt, Robert P. Ried