Abstract: A test reticle and alignment mark optimization method is provided for determining the optimal alignment mark size for the efficient and accurate alignment of process layers during integrated circuit manufacture. The test reticle includes a number of orthogonally arranged alignment marks of various types and sizes and one or more registration structures. The method involves the steps of determining an initial expected range of alignment mark sizes on the test reticle which are suitable for a particular application; applying the test reticle patter to test wafers; further processing the test wafers; measuring the alignment signals produced by scanning the alignment marks in the initial expected range; quantifying the alignment signal quality; and fitting the quantified alignment signal quality to a statistical model to determine a range of optimal alignment signal dimensions.

Abstract: A 3D photographic printer and printing method wherein a stationary projection lens is used to project a series of 2D views each at a different projection angle onto a stationary lenticular print material. The aperture of the projection lens is sufficient large to cover the entire width of each of the lenticules on the print material. The lens aperture is mechanically or optically partitioned into a number of sections so that only one section is opened to allow a 2D view to be exposed at a different projection angle.

Abstract: A wedge shaped platen scanner sequentially records opposing pages of a bound document positioned thereon. A dichroic mirror is positioned between the surfaces of the wedge shaped platen. The two sides of the opposing pages of the bound document are exposed by light having different wavelengths. One side is exposed by a flash lamp that emits light with a wavelength that forms an optical path through the dichroic mirror and onto an imaging station. The other side is exposed by a flash lamp emits light with a wavelength that forms a reflective path off of the dichroic mirror and onto the imaging station. A controller insures that the opposing pages of the bound document are sequentially illuminated by the two flash lamps. Images of opposing pages of the bound document are focused through optics onto the imaging station. In one arrangement, the imaging station is a two-dimensional array of detectors which sense an image of a page of the bound document projected thereon.

Abstract: A negative film masking apparatus for use in a photographic printer comprises positioning pins arranged for projecting from the upper surface of the masking base to locate the negative film masking at a given position, detector switches provided for projecting from the upper surface of the masking base to detect the type of the negative film masking, and a lifting means for driving the positioning pins and the detector switches to project from the upper surface of the masking base.

Abstract: A photographing apparatus includes an optical system for projecting an image of an original onto a film, and a camera unit detachably mountable relative to a main body of the apparatus. The camera unit includes a case, which includes a supply reel and a takeup reel. The apparatus also includes a holding unit disposed on the main body of the apparatus for detachably holding the camera unit in a first posture and in a second posture opposite to the first posture, and a display unit for separately displaying a photographable amount of the film within the camera unit when the camera unit is held in the first posture and a photographable amount of the film when the camera unit is held in the second posture.

Abstract: An apparatus for conveying a photographic film is structured such that, when it is determined that an image frame does not exist, information indicating the image frame does not exist is recorded by a recording head onto a magnetic recording layer which corresponds to an image frame recording area. Accordingly, before the image frame is positioned at the subsequent processes for operation, by reading the information on the magnetic recording layer, it can be detected that the image frame does not exist in an image frame area. Further, it is not necessary to position the image frame area in which the image frame does not exist and only the image frame area in which an image frame exists are positioned for printing.

Abstract: Orientation of a removable film gate with a docking frame is accomplished by a releasable locator connector assembly in conjunction with a force-responsive clamp assembly. The locator connector assembly includes a male connector subassembly on the removable film gate and a female connector subassembly located on the docking frame. A spring-biased threaded screw in the male connector subassembly connects with a tapped end of a locator pin in the female connector subassembly. The threaded screw and tapped locator pin locate each other by a cone-shaped protrusion at the top of the locator pin in conjunction with a recessed area of a locator seat within the male connector subassembly. The force-responsive clamp assembly accepts a tab of the removable film gate when the film gate is pushed into the photographic film printer, and releases the tab when a pulling force is applied to the film gate.

Abstract: An exposure apparatus includes an exposure optical system, a stage on which an article to be exposed is to be placed, a moving mechanism for moving the stage relative to the exposure optical system, a first base for supporting the moving mechanism, a main base for supporting the exposure optical system, on which main base the first base is mounted, a first supporting portion being interposed between the first base and the main base, a second base for supporting the main base, a vibration removing device being interposed between the main base and the second base, and a second supporting portion being interposed between the first base and the second base.

Abstract: A projection exposure apparatus having an illuminating optical system for irradiating a mask having a pattern with illuminating light for exposure, and a projection optical system which is composed of a plurality of optical elements and arranged to take in light emanating from the pattern of the mask and to project an image of the pattern on a photosensitive substrate with predetermined image-forming characteristics. The projection exposure apparatus is provided with a movable retaining member for causing at least one of a plurality of lens elements constituting the projection optical system to move relative to the entire projection optical system in accordance with exchange, loading or unloading of an optical corrector plate, e.g., a pupil filter, which is disposed on a Fourier transform plane of the projection optical system.

Abstract: A scanning type exposure apparatus and method includes structure and steps for: scanningly moving a mask and a substrate relative to light pulses; continuously irradiating the light pulse to the substrate through the mask; and controlling an exposure amount of the substrate, wherein the control causes an average value of light quantity of a predetermined number of continuous light pulses to be substantially equal to a target value by controlling the light quantity of a next light pulse, in accordance with an integrated light quantity of a previous number of light pulses.

Abstract: In a method of printing an original image on a photographic paper with an exposure device, the exposure device has an reference exposure light, an image corresponding to the original image is formed on a mask sheet and the photographic paper is printed by exposure lights passing through the mask sheet under the reference exposure light, wherein image signals from the original image are processed so as to satisfy the condition that the mask sheet is used under the reference exposure light.

Abstract: A negative stage comprises a lower platform and an upper platform. Each of the platforms includes an aperture for allowing passage of light through the platform from a light source in the enlarger. The platforms are aligned in a face-to-face relationship with the apertures generally in alignment. The platforms are spaced-apart by a fixed pivot-member and two adjustable support-members extendable in a direction generally perpendicular to the platforms for adjusting spacing and alignment of the platforms. In one embodiment the upper platform is retained in contact with the pivot-member and adjusting screws by spring loaded plungers. The spring loaded retaining arrangement allows relative movement between the platforms for alignment while still retaining the platforms firmly in contact with the pivot-member and adjusting screws.

Abstract: A description is given of a scanner (2) which is intended for manual document input and can be converted for automatic document intake, having a cover unit (30) which comprises a cover (38), a folding part (36) and a retaining part (34) which is connected releasably to the scanner housing (4). The folding part connects the cover to the retaining part in a link-like manner via parallel hinges (40) fitted on both sides of the folding part. The folding part, furthermore, exhibits an elongate through-passage (44) which extends over the operating width and runs parallel to the hinges.

Abstract: An arrangement of a color enlarger head is disclosed that allows an original picture negative to be irradiated for print-out with an even quantity of light without the need for adjusting a quantity of light transmitted through a diffuse transmission plate disposed on an exit side of a diffusion box. Them is provided below the diffusion box a light distribution adjusting box in which the light rays transmitted through the diffuse transmission plate are appropriately reflected so as to increase the quantity of light entering a peripheral zone of the original picture negative and thereby to equalize the light rays available to print out the original picture negative. Specifically, below The diffuse transmission plate 60 there is provided a light distribution adjusting box 62 defined by a frame 62a and a bottom 62b provided at a central zone with an opening serving as a projecting window 62c.

Abstract: An image converting apparatus, such as an optical scanner, photocopier or an image projector, includes a document contacting device with a contact surface that is provided with a plurality of micro-particles which diffuse light to eliminate the effects of thin-film interference. The micro-particles on the contact surface have a distribution density greater than the resolution of the image converting apparatus.

Abstract: An exposure slit is provided for a shuttle style film gate in a film transport. The exposure slit is provided on a plate that is mounted to the film gate shuttle. After the shuttle advances a frame of the film, it carries the slit with it during its return to a home position. Exposure of the film frame is made through the slit during the return travel.

Abstract: In an exposing apparatus including an alignment stage A, an exposing stage B, transferring mechanisms 10 and 11 provided in the alignment stage and the exposing stage, a light source device 9, and an image-taking device for taking the images of the work W from the top of the work, the exposing apparatus further including a retaining mechanism for holding a mask film M from the top of the mask film, the retaining mechanism comprising a suction unit 5a for sucking the mask film, a supporting arm 17 for supporting the suction unit so as to be movable up and down, a first driving device 14 for moving the supporting arm up and down, a second driving device vice 15 for moving the first driving device up and down, and a stopper supporting unit 20 for fixing and supporting the suction unit at a predetermined position of the suction unit, so that this apparatus occupies a small space, and the work is accurately aligned with the mask film, and the upper and lower frames do not need to be opened and closed in the alignm

Abstract: A system for assisting manual placement of odd-shaped original documents on the exposure platen of a copier or scanner includes a detection device disposed on an edge of the platen. The device includes a light source emitting a light beam substantially parallel to a surface of the platen, and a photosensor adapted to detect light resulting from the reflection of the light beam by an object on the surface of the platen. A main focus direction of the light source and a main focus direction of the photosensor intersect at a predetermined position on the surface of the platen.

Abstract: A level F.sub.A at a shot center of a specified shot is measured. A level F.sub.B is measured at a nonexposure region. A level difference .DELTA.F is calculated based on the level F.sub.A at the shot center and the level F.sub.B at the nonexposure region. After the level difference .DELTA.F is calculated for all the specified shots, an average value .DELTA.F.sub.ave of level differences .DELTA.F is calculated. Thereafter, focusing based on the average value .DELTA.F.sub.ave and subsequent exposure are executed for the respective shots in a step-and-repeat manner. Thereby, a focusing method in photolithography enables formation of elements having good pattern configuration even if the pattern is miniaturized to a higher extent in accordance with high integration.

Abstract: An exposure apparatus includes a cleaning tool which is located at a position where it is brought into contact with the entire surface of a wafer holder when a wafer stage moves within a predetermined driving range, and a vertical driving shaft for biasing the cleaning tool against the wafer holder. While the cleaning tool is biased against the wafer holder, the wafer stage is moved within the predetermined driving range, thereby cleaning the wafer holder.