Abstract: Embodiments of the present invention generally provide a plasma source apparatus, and method of using the same, that is able to generate radicals and/or gas ions in a plasma generation region that is symmetrically positioned around a magnetic core element by use of an electromagnetic energy source. In general, the orientation and shape of the plasma generation region and magnetic core allows for the effective and uniform coupling of the delivered electromagnetic energy to a gas disposed in the plasma generation region. In general, the improved characteristics of the plasma formed in the plasma generation region is able to improve deposition, etching and/or cleaning processes performed on a substrate or a portion of a processing chamber that is disposed downstream of the plasma generation region.

Abstract: A transmitter apparatus and a ballast/driver receiver apparatus are presented for transmitting control information through a lighting system power line connection to a ballast or driver in which the transmitter selectively interrupts power delivery in select AC line power cycles to indicate data of a first binary state an uninterrupted power cycles indicate a second binary state with the receiver decoding the message data bits of different binary states based at least partially on the interruptions.

Abstract: Power conversion apparatus includes a converter circuit, a control circuit, a simulation circuit and a sense circuit. The converter circuit includes a magnetic device for power conversion and a switching device, and is configured to convert power from a power supply into direct current power. The control circuit is configured to supply the converter circuit with a high frequency signal for turning the switching device on and off. The simulation circuit is configured to produce a simulation signal that simulates state or change of magnetic flux of the magnetic device. The sense circuit is configured to produce a signal which corresponds to at least one of the input and output of the converter circuit and is superposed on the simulation signal to form a superposed signal. The control circuit defines an on-period of the high frequency signal based on the superposed signal.