Patents Examined by George Fourson, III
-
Patent number: 10170543Abstract: A fin field effect transistor device with air gaps, including a source/drain layer on a substrate, one or more vertical fin(s) in contact with source/drain layer, a gate metal fill that forms a portion of a gate structure on each of the one or more vertical fin(s), and a bottom void space between the source/drain layer and the gate metal fill.Type: GrantFiled: October 25, 2017Date of Patent: January 1, 2019Assignee: International Business Machines CorporationInventors: Hari V. Mallela, Robert R. Robison, Reinaldo A. Vega, Rajasekhar Venigalla
-
Patent number: 10170318Abstract: A semiconductor device and a method of forming the semiconductor device are disclosed. A method includes forming a gate stack over a semiconductor structure. The gate stack is recessed to form a first recess. A first dielectric layer is formed along a bottom and sidewalls of the first recess, the first dielectric layer having a first etch rate. A second dielectric layer is formed over the first dielectric layer, the second dielectric layer having a second etch rate, the first etch rate being higher than the second etch rate. A third dielectric layer is formed over the second dielectric layer. An etch rate of a portion of the third dielectric layer is altered. The first dielectric layer, the second dielectric layer, and the third dielectric layer are recessed to form a second recess. A capping layer is formed in the second recess.Type: GrantFiled: February 6, 2018Date of Patent: January 1, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Bang-Tai Tang, Tai-Chun Huang
-
Patent number: 10170411Abstract: A method for via alignment includes forming first airgaps between interconnect structures and depositing a pinch off layer to close off openings to the first airgaps. A protection layer is formed in divots in the pinch off layer. The protection layer and the pinch off layer are planarized to form a surface where the protection layer remains in the divots. An interlevel dielectric layer (ILD) is deposited on the surface. The ILD and the pinch off layer are etched using the protection layer as an etch stop to align a via and expose the interconnect structure through the via.Type: GrantFiled: January 24, 2018Date of Patent: January 1, 2019Assignee: International Business Machines CorporationInventors: Benjamin D. Briggs, Lawrence A. Clevenger, Christopher J. Penny, Michael Rizzolo
-
Patent number: 10163715Abstract: A FinFET device and a method of forming the same are provided. A method includes forming a fin over a substrate. An isolation region is formed adjacent the fin. A dummy gate structure is formed over the fin. The fin adjacent the dummy gate structure is recessed to form a first recess. The first recess has a U-shaped bottom surface. The U-shaped bottom surface is below a top surface of the isolation region. The first recess is reshaped to form a reshaped first recess. The reshaped first recess has a V-shaped bottom surface. At least a portion of the V-shaped bottom surface comprises one or more steps. A source/drain region is epitaxially grown in the reshaped first recess.Type: GrantFiled: October 20, 2017Date of Patent: December 25, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Teng Liao, Chih-Shan Chen, Yi-Wei Chiu, Ying Ting Hsia, Tzu-Chan Weng
-
Patent number: 10163930Abstract: A semiconductor device includes bit lines extending along a first direction, the bit lines being arranged along a second direction intersecting the first direction, a plurality of channel layers disposed under the bit lines, the plurality of channel layers extending in a third direction perpendicular to a plane extending along the first and second directions and spaced apart along the second direction, so that each channel layer is at least partially overlapped with at least two of the bit lines, and a contact plug extending, from the channel layer, toward one of the bit lines overlapped with the channel layer.Type: GrantFiled: December 5, 2017Date of Patent: December 25, 2018Assignee: SK Hynix Inc.Inventor: Nam Jae Lee
-
Patent number: 10163798Abstract: An embedded multi-die interconnect bridge apparatus and method includes photolithographically formed interconnects coupled to laser-drilled interconnects. Several structures in the embedded multi-die interconnect bridge apparatus exhibit characteristic planarization during fabrication and assembly.Type: GrantFiled: December 22, 2017Date of Patent: December 25, 2018Assignee: Intel CorporationInventors: Amruthavalli Pallavi Alur, Sri Ranga Sai Boyapati, Robert Alan May, Islam A. Salama, Robert L. Sankman
-
Patent number: 10157897Abstract: A display component can include an array of pixels and a color conversion film. Each pixel in the array can include one or more green sub-pixel emitters and a plurality of blue sub-pixel emitters. The color conversion film can be disposed on a subset of the plurality of blue sub-pixel emitters. The color conversion film can be configured to convert blue light from the subset of the plurality of blue sub-pixel emitters to red light to realize a pixel including red, green and blue emitters.Type: GrantFiled: January 2, 2018Date of Patent: December 18, 2018Assignee: Intel CorporationInventors: Marshall Smith, Khaled Ahmed
-
Patent number: 10157774Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a contact scheme for landing on different contact area levels of a semiconductor structure and methods of manufacture. The structure includes a first contact at a first level of the structure; a jumper contact at a second, upper level of the structure; an etch stop layer having an opening over the first contact and partially encapsulating the jumper contact with an opening exposing the jumper contact; and contacts in electrical contact with the first contact at the first level and the jumper contact at the second, upper level, through the openings.Type: GrantFiled: July 25, 2017Date of Patent: December 18, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Carsten K. Peters, Peter Baars
-
Patent number: 10153327Abstract: A semiconductor device includes first isolation lines positioned above a substrate and extending in a first direction. Second isolation lines are positioned above the first isolation lines and extend in a second direction, perpendicular to the first direction, to have a right angle on a plane parallel to an upper surface of the substrate. A first conductive line is disposed between the first isolation lines. The first conductive line is spaced apart from the substrate. A second conductive line is disposed between the second isolation lines. First data storage patterns are disposed between the first isolation lines. The first data storage patterns are positioned above the first conductive line. Second data storage patterns are disposed between the second isolation lines. The second data storage patterns are positioned above the second conductive line. A third conductive line is positioned above the second isolation lines and extends in the first direction.Type: GrantFiled: December 21, 2017Date of Patent: December 11, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Jong Chul Park
-
Patent number: 10147696Abstract: An electronic device and a method for producing an electronic device are disclosed. In an embodiment the electronic device includes a first component and a second component and a sinter layer connecting the first component to the second component, the sinter layer comprising a first metal, wherein at least one of the components comprises at least one contact layer which is arranged in direct contact with the sinter layer, which comprises a second metal different from the first metal and which is free of gold.Type: GrantFiled: September 17, 2015Date of Patent: December 4, 2018Assignee: OSRAM Opto Semiconductors GmbHInventor: Andreas Ploessl
-
Patent number: 10147730Abstract: Provided is a memory device including a substrate, a source region, a drain region, a source contact, a drain contact, at least two stack gates, and at least two selection gates. The source region and the drain region are both located in the substrate. The source contact is located on the source region and the drain contact is located on the drain region. A bottom area of the drain contact is greater than a bottom area of the source contact. The stack gates are located on the substrate at two sides of the source region respectively. The selection gates are located on the substrate at two sides of the drain region respectively. A distance between the selection gates located at two sides of the drain region is greater than a distance between the stack gates located at two sides of the source region.Type: GrantFiled: March 15, 2018Date of Patent: December 4, 2018Assignee: Winbond Electronics Corp.Inventors: Che-Fu Chuang, Hsiu-Han Liao, Yao-Ting Tsai
-
Patent number: 10141279Abstract: A semiconductor device includes a semiconductor substrate, a conductor provided on a main surface of the semiconductor substrate, an insulating layer disposed to cover a surface of the conductor and having a recess from a surface thereof towards the conductor, the recess having an opening provided at a bottom portion of the recess and exposing a portion of the conductor, and an external connection terminal connected to the portion of the conductor exposed from the opening. In a plan view of the semiconductor device, the external connection terminal covers the entire opening, and the entire external connection terminal is within the recess.Type: GrantFiled: December 22, 2017Date of Patent: November 27, 2018Assignee: LAPIS Semiconductor Co., Ltd.Inventor: Masanori Shindo
-
Patent number: 10134784Abstract: To eliminate electric discharge when an element formation layer including a semiconductor element is peeled from a substrate used for manufacturing the semiconductor element, a substrate over which an element formation layer and a peeling layer are formed and a film are made to go through a gap between pressurization rollers. The film is attached to the element formation layer between the pressurization rollers, bent along a curved surface of the pressurization roller on a side of the pressurization rollers, and collected. Peeling is generated between the element formation layer and the peeling layer and the element formation layer is transferred to the film. Liquid is sequentially supplied by a nozzle to a gap between the element formation layer and the peeling layer, which is generated by peeling, so that electric charge generated on surfaces of the element formation layer and the peeling layer is diffused by the liquid.Type: GrantFiled: February 9, 2017Date of Patent: November 20, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shingo Eguchi, Yohei Monma, Atsuhiro Tani, Misako Hirosue, Kenichi Hashimoto, Yasuharu Hosaka
-
Patent number: 10134667Abstract: Provided are a chip-on-film (COF) semiconductor package capable of improving connection characteristics and a display apparatus including the package. The COF semiconductor package includes a film substrate, a conductive interconnection located on at least one surface of the film substrate and an output pin connected to the conductive interconnection and located at one edge on a first surface of the film substrate, a semiconductor chip connected to the conductive interconnection and mounted on the first surface of the film substrate, a solder resist layer on the first surface of the film substrate to cover at least a portion of the conductive interconnection, and at least one barrier dam on the solder resist layer between the semiconductor chip and the output pin.Type: GrantFiled: April 27, 2018Date of Patent: November 20, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jung-woo Kim, Jae-min Jung, Ji-yong Park, Jeong-kyu Ha, Woon-bae Kim
-
Patent number: 10134833Abstract: A method is presented for tuning work functions of transistors. The method includes forming a work function stack over a semiconductor substrate, depositing a germanium oxide layer and a barrier layer over the work function stack, and annealing the germanium oxide layer to desorb oxygen therefrom to trigger oxidation of at least one conducting layer of the work function stack. The work function stack includes three layers, that is, a first layer being a TiN layer, a second layer being a titanium aluminum carbon (TiAlC) layer, and a third layer being a second TiN layer.Type: GrantFiled: October 19, 2017Date of Patent: November 20, 2018Assignee: International Business Machines CorporationInventors: Takashi Ando, Pouya Hashemi, Choonghyun Lee
-
Patent number: 10134791Abstract: A backside illumination global shutter pixel is disposed in a substrate having a first surface and a second surface and includes an isolation structure having a deep trench isolation pattern, a storage node, and a photoelectric conversion element. The deep trench isolation pattern has a channel and defines a first region and a second region connected with each other by the channel. The storage node is disposed in the second region. The photoelectric conversion element has a main photoelectric conversion portion disposed in the first region and an extending photoelectric conversion portion extended from the main photoelectric conversion portion through the channel to the second region. The extending photoelectric conversion portion is disposed between the second surface and the storage node. A backside illumination global shutter sensor including a plurality of backside illumination global shutter pixels is also provided.Type: GrantFiled: December 20, 2017Date of Patent: November 20, 2018Assignee: Novatek Microelectronics Corp.Inventors: I-Hsiu Chen, Wei-Kuo Huang
-
Patent number: 10134832Abstract: A semiconductor device includes: a first conductivity type drift region having crystal defects generated by electron-beam irradiation; a first main electrode region of a first conductivity type arranged in the drift region and having an impurity concentration higher than that of the drift region; and a second main electrode region of a second conductivity type arranged in the drift region to be separated from the first main electrode region, wherein the crystal defects contain a first composite defect implemented by a vacancy and oxygen and a second composite defect implemented by carbon and oxygen, and a density of the crystal defects is set so that a peak signal intensity of a level of the first composite defect identified by a deep-level transient spectroscopy measurement is five times or more than a peak signal intensity of a level of the second composite defect.Type: GrantFiled: June 29, 2017Date of Patent: November 20, 2018Assignee: FUJI ELECTRIC CO., LTD.Inventors: Yasunori Agata, Hidenori Takahashi, Naoki Mitamura, Aki Shimamura, Daisuke Ozaki
-
Patent number: 10135033Abstract: An organic light emitting diode (OLED) incorporating a light extraction film is disclosed. The light extraction film may be used for enhancing light extraction from a light source. The light extraction film may include an array of 3-D microprisms, an interstitial region, and a glass layer. Each microprism may have an area of a first surface (A1) and an area of a second surface (A2). The A2 may be equal to or less than A1. Each microprism may have a pair of oppositely disposed sidewalls. The interstitial region may be disposed between the pair of oppositely disposed sidewalls of adjacent microprisms. The interstitial region may have an index of refraction less than an index of refraction of the microprism. The glass layer may be attached to the first surface of the array of 3-D microprisms. The glass layer may be less than about 1 mm thick.Type: GrantFiled: October 16, 2017Date of Patent: November 20, 2018Assignee: Corning IncorporatedInventors: Tomohiro Ishikawa, Michal Mlejnek
-
Patent number: 10128218Abstract: A semiconductor device is disclosed that is formed with die bond pads at an edge of the semiconductor die. The die bond pads may be formed partially in a kerf area between semiconductor die on a wafer. When the wafer is diced, the die bond pads are severed along their length, leaving a portion of the die bond pads exposed at an edge of the diced semiconductor die. Having die bond pads at the edge of the die minimizes the offset between die when stacked into a package.Type: GrantFiled: June 22, 2017Date of Patent: November 13, 2018Assignee: SanDisk Semiconductor (Shanghai) Co. Ltd.Inventors: Junrong Yan, Chee Keong Chin, Chong Un Tan, Ming Xia Wu, Kim Lee Bock, Shrikar Bhagath
-
Patent number: 10115649Abstract: A semiconductor device encompasses a connecting base including a semiconductor substrate and a surface insulating-film on the semiconductor substrate, a passivation film covering the surface insulating-film and surface electrode on the surface insulating-film, establishing a groove that exposes a central part of the surface electrode, a barrier-metal film spanning from the bottom of the groove to an upper face of the passivation film, and micro-bumps arranged on the barrier-metal film located on the passivation film.Type: GrantFiled: December 21, 2017Date of Patent: October 30, 2018Assignee: TOHOKU-MICROTEC CO., LTD.Inventor: Makoto Motoyoshi