Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements.

Abstract: A vibration rectification error correction circuit includes a first correction circuit that obtains a digital value based on a signal to be measured output from a sensor element configured to measure a physical quantity and corrects a vibration rectification error of the digital value by a correction function based on a product of values obtained by biasing the digital value.

Abstract: An inertial sensor is an inertial sensor for detecting a physical quantity based on a displacement in a Z axis when defining three axes perpendicular to each other as an X axis, a Y axis, and the Z axis, and is provided with a substrate, a movable body which is fixed to the substrate, oscillates around an oscillation axis along the X axis, and has two planes opposed to each other and side surfaces connecting the two planes to each other, and a limiter which is fixed to the substrate, and is opposed to the side surfaces of the movable body, wherein the movable body is provided with a resilient portion in a portion opposed to the limiter.

Abstract: A device for detecting the approach of a vortex ring state for a rotary wing aerodyne, the detection device including a set of vibration sensors configured to be distributed in or on the aerodyne, and a data processing unit configured to receive in real time measurement data from the sensors, process the data in order to calculate in real time the vibration spectrum of the aerodyne, detect in real time, by vibration analysis, the approach of a vortex ring state as a function of the calculated vibration spectrum, and issue an alarm in the event of detection of the approach of a vortex ring state.

Abstract: The adjustable voltage regulator under control of a microcontroller applies controlled amplitude voltage in the range of 5 to 9VDC to the sensor transmitter to adjust the output amplitude of the transmitter. The adjustable amplitude transmitter allows an occupancy sensor to have its total output energy adjusted to reduce environmental noise-induced false triggering and to conform to the area to be covered. Lowering the total ultrasonic energy in the monitored space lowers the sensitivity of the receiver to inappropriate activations. Lowering the input power to the transmitter also lowers the total internal system noise and provides an improved signal to noise ratio in the receiver.

Abstract: A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.

Abstract: A low-stress packaging structure for a MEMS acceleration sensor chip includes a MEMS sensor chip and a chip carrier. Two sides of the bottom of the sensor chip are provided with a first metal layer and a second metal layer respectively. Two sides of a die attach area of the chip carrier are correspondingly provided with a third metal layer and a fourth metal layer. The first metal layer of the sensor chip and the third metal layer of the chip carrier are bonded together. The second metal layer of the sensor chip and the fourth metal layer of the chip carrier are only in contact but not bonded. A groove is arranged between the first metal layer and the second metal layer at the bottom of the sensor chip. A certain gap is defined between the sensor chip and cavity walls of chip carrier.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: A signal processing device includes a detection circuit, a correction circuit, and a comparator circuit. The detection circuit generates a first detection signal, based on an output signal of a capacitive detection element that detects inertial force. The correction circuit corrects non-linearity of the first detection signal and outputs a second detection signal thus corrected. The comparator circuit compares the first detection signal and the second detection signal with each other and outputs a comparison signal representing a result of comparison.

Abstract: An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body disposed within a housing and defining tangential side faces arranged tangentially to the vertical axis, and a normal side face arranged normally to the vertical axis. A piezoelectric element is secured to one of the tangential side faces, and a seismic mass secured to the piezoelectric element. A signal output is attached to the housing and includes a signal conductor spaced apart by an assembly gap from a tangential side face that is not attached to the piezoelectric element. The assembly gap extends perpendicularly to the vertical axis. The normal side face includes main body output conductors spanning the assembly gap in a direction perpendicular to the vertical axis and directly contacting the signal conductor.

Abstract: An inertial sensor includes, provided that axes X, Y, and Z are three axes perpendicular to one another, a substrate, a fixed section fixed to the substrate, a movable element that swings around a swing axis extending along the axis Y, a first beam and a second beam that link the fixed section to the movable element and are torsionally deformed by the swing motion of the movable element, and a detection electrode that is disposed on the substrate and overlaps with the movable element in the plan view along the axis-Z direction, and the first beam and the second beams differ in shape from each other and have the same torsional spring constant.

Abstract: Systems and methods relating to sensors for measuring acceleration. Two attached containers are each filled with different liquids. At each junction of the two liquids, an indicator is placed. When acceleration forces are applied to the sensor, the indicator moves when the boundary between the two liquids similarly move. The amount of movement of the boundary and of the indicator is proportional to the amount of acceleration for applied. A tracking subsystem tracks the position of the indicator and, by determining the amount of movement of the indicator, the amount of acceleration force applied can be calculated. The indicator can be a particle or it can be a beam-like element that deflects when the boundary between the two liquids move.

Abstract: A gyro sensor includes: a spring having an inner span beam connected to an outer span beam via a turnaround beam; and a fixed driver that laterally faces the outer beam. A first beam is provided to the structure side of the outer beam so as to face the outer beam. T1 is a width of a space between the outer beam and the structure, T2 is a width of a space between the inner and outer beams, and T2<T1.

Abstract: A method and system are described for determining a wall thickness of an object such as a pipeline using ultrasound. A pig is used that includes at least one first ultrasonic transducer that is attached to the pig for transmitting ultrasound in the object. Using at least one second ultrasonic transducer, a receiving signal is generated representing reflections of the ultrasound on the object received by the at least one second transducer. The received signals are processed by a processor provided at the pig to obtain a compressed receiving signal. In use, the processor determines a maximal N peaks having largest amplitudes and associated information on a moment on which each one of the maximal N peaks occurs within the receiving signal. Information about the maximal N peaks and associated information on the moment on which the maximal N peaks occurs is stored as the compressed receiving signal in a storing device of the pig.

Abstract: An acceleration transducer defines a rectangular coordinate system with two orthogonal horizontal axes that are both normal to a vertical axis and includes a main body defining tangential side faces arranged tangentially to the vertical axis, and normal side faces arranged normally to the vertical axis. The transducer includes a converter unit, exactly three piezoelectric elements and three seismic masses. Each piezoelectric element generates piezoelectric charges transmitted to the converter unit, which is only and directly arranged on a normal side face of the main body or only on a support that is attached to a normal side face of the main body. Exactly one piezoelectric element is secured to each of the three tangential side faces, and exactly one seismic mass is secured to each of the three piezoelectric elements.

Abstract: A sensor for use in a fluid flow application is provided. The sensor includes an inlet chamber configured to receive a fluid flow from a first conduit, an outlet chamber configured to provide the fluid flow to a second conduit, and a membrane separating the inlet chamber from the outlet chamber, the membrane including a fluid passage to allow the fluid flow from the inlet chamber to the outlet chamber. The sensor also includes a circuit component disposed on the membrane, having an electrical property configured to change according to a deformation of the membrane, and a conductor formed on a substrate and coupled with the circuit component, to provide an electrical signal based on a change in the electrical property of the circuit component. The membrane includes an epitaxial layer formed on the substrate. Methods for fabricating and using the above sensor are also presented.

Abstract: A method for controlling a system including a power-tool and a battery having energy storage cells, wherein the system includes an acceleration sensor, a piezoelectric sensor, a controlling device, signal transmitter and a device for measuring a voltage. Method includes the steps: Determining vibration values; Determining that the system is free-falling; Determining an impact of the system by detecting an acceleration value in the X, Y and Z direction exceeding a first predetermined threshold value; and Determine a traveling distance between detecting an acceleration value in the X, Y and Z direction being equal to a predetermined range and detecting an acceleration value in the X, Y and Z direction exceeding the first predetermined threshold value. A system for carrying out the method is also provided.

Abstract: A three-axis accelerometer includes a single, integrated mass including at least one lateral (x-y) proof mass and at least one vertical (z) proof mass. The vertical proof mass is arranged as a teeter-totter mass, which is located within the lateral proof mass. The vertical proof mass is mechanically coupled to the lateral proof mass with one or more torsional springs, and the lateral proof mass is mechanically coupled to one or more anchors with one or more lateral springs. The at least one vertical proof mass may be symmetrically positioned about one or more axes of the three-axis accelerometer, so that the 3-axis accelerometer has in-plane symmetry. The three-axis accelerometer may be less susceptible for mechanical cross-talk or noise and may provide a smaller packaged solution for sensing acceleration in three directions.

Abstract: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

Abstract: A method for evaluating a target, the target having a surface, includes pulsing a defined, energetic particle beam through the surface and into the target such that particle energy deposition from the particle beam is concentrated in a subsurface target volume within a target medium of the target. The deposited particle energy induces a thermoelastic expansion of the target medium in the target volume that generates a corresponding acoustic wave. The method further includes detecting the acoustic wave from the target medium.