Abstract: The invention relates to an angular velocity sensor used in posture control of a moving element or navigation system, and is intended to realize higher sensitivity, lower offset, lower offset drift, lower translation acceleration sensitivity, and higher impact resistance in a small size and at low cost.
Type:
Grant
Filed:
April 14, 1997
Date of Patent:
October 20, 1998
Assignee:
Matsushita Electric Industrial Co., Ltd.