Abstract: A baggage inspection device based on coherent x-ray scatter has an x-ray source on one side of the scanning area and detectors on the other side of the scanning area. The detectors measure the energy of the scattered x-ray quanta. A primary ray collimator is arranged between scanning area and x-ray source. A secondary ray collimator for scattered rays is arranged between scanning area and detectors. The detectors are positioned on a Z axis forming an axis of symmetry for the secondary ray collimator. A point 0 on the Z axis forms the origin of a Cartesian coordinate system. The primary ray collimator allows passage only of x-ray beams impinging on the point 0. The x-ray source has an extended anode with a focus position controlled electronically about the anode length. Primary ray collimator and x-ray source extend cylindrically symmetrically about the symmetry axis or parallel to the Y axis in the X-Y plane.

Abstract: A radiation detector includes a plurality of detector modules detachably mounted on a detector base. Each of the detector modules has a plurality of element blocks permanently mounted on a module base. Each element block has a plurality of radiation detection elements formed on a signal substrate in the form of an m×n matrix. A detector module is made up of a plurality of element blocks. A radiation detector is made up of a plurality of detector modules. This makes it possible to tile many detection elements and manufacture a radiation detector with a wide field of view.

Abstract: The invention relates to a method for fluorescent X-ray analysis of a sample, which sample includes: a substrate (5) containing a chemical element b; a thin layer (6) which is deposited on the substrate and contains the chemical element b and a chemical element a, which method includes the steps of: irradiating the sample by means of primary X-rays, detecting the intensity of X-ray lines of comparatively hard fluorescent X-rays and comparatively soft fluorescent X-rays, both produced in the sample due to irradiation by means of the primary X-rays, wherein one or more of the following combinations of the fluorescent X-ray lines of the chemical elements a and b are detected: b-L/b-K; b-K/a-L; b-L/a-L; b-L/a-M; a-M/a-L a-M/a-N a-K/b-K a-K/b-L a-K/a-L; and the thickness of the thin layer (6) and/or the concentration of the first or the second chemical element are detected on the basis of the detected X-ray lines of the comparatively hard and the comparatively soft fluorescent X-rays.

Abstract: A shielding grid constructed of a radiation absorbing material for use with an array of discreet, non contiguous radiation sensors to protect such sensors from scattered radiation. The sensors each have a radiation sensitive area with a width and a length. In designing the grid a prototile having a prototile width and a prototile length is developed. The prototile width is equal to the radiation sensitive area width divided by an integer and the prototile length is also equal to the radiation sensitive area length divided by a integer. The prototile contains a motif contained solely within the prototile that forms a pattern when a plurality of prototiles sufficient to cover the array of discreet sensor are arrayed contiguously. The grid is constructed with the radiation absorbing material in this pattern.

Abstract: An apparatus for reading out a storage luminophore plate has a holder for the storage luminophore plate as well as for a detector line, and a device for setting the spacing between the storage luminophore plate and the detector line such that this spacing is controlled or regulated to be substantially constant with reference to the storage luminophore plate, at least over the region of the detector line.

Abstract: A method is described for generating EUV radiation, comprising the steps of: generating a flow (35) of liquid droplets (39); injecting the flow into a source space (33) connected to a vacuum pump (34), and successively irradiating individual droplets (39) with an intense, pulsed, laser beam (41) focused on a droplet, thus creating a plasma (47) which emits EUV radiation. In order to prevent that liquid vapor destroys the vacuum in the source space (33) and to guarantee a continuous flux of EUV radiation, the flow (35) is guided through additional vacuum spaces (53, 56, 63) in series with the source space. Also described are an EUV radiation source unit for realizing the method and the application of the method in the manufacture of devices, like IC devices, and in a lithographic projection apparatus.

Abstract: The present invention relates to a digital radiography device with protection against electrical risks, having: a radiation source (10); a sensor (12) connected to an electronic card (13) of a computer (14), first and second assemblies (20, 21) isolated from each other from the galvanic point of view, the first assembly (20) comprising electronic means connected to the sensor (12), the second assembly (21) comprising means for supplying a voltage for supplying the sensor (12) during the presence of radiation and a voltage for supplying the sensor part of the card (13), and means for providing management of the sensor, recovery of the data and processing thereof; the two assemblies (20, 21) exchanging information by optical means.