Abstract: A method for drying wafers after a wet bench process is disclosed. In the method, a wafer is first immersed in a volume of DI water held in a container. A mixture of alcohol vapor/inert gas is then flown into the upper portion of the container that is not filled with the volume of DI water at a flow rate of less than 20 l/min. The wafer is then withdrawn from the DI water into the upper portion of the container filled with the alcohol vapor/inert gas mixture and thereby driving DI water molecules off the surface of the wafer without leaving organic residue on the wafer surface.

Abstract: Air/fuel ratio control for an internal combustion engine includes the use of a first exhaust gas oxygen sensor (EGO) upstream of a catalytic converter and a second exhaust gas oxygen sensor downstream of the catalytic converter. The output of the first EGO sensor is passed through a high pass filter and then combined in a summer with the output of the second EGO sensor. The output of the summer is applied to a proportional and integral controller which then provides an output used to generate the fuel control signal.

Abstract: An injection pump, especially for motor vehicles with a control rack and a centrifugal governor, in which the control rack is adjustable by way of a first vacuum box in dependence on the ignition key position and in which, in the stop position of the ignition key, vacuum is applied to the first vacuum box and the control rack is transferred into its turn-off position; a second temperature-dependent vacuum box adapted to be connected with vacuum is provided, whereby an end position corresponding to the full load position is adapted to be determined for the control rack by way of this second vacuum box above a predetermined engine limit temperature.