Abstract: The present invention provides a system for characterizing voids in test samples. An x-ray emission inducer scans a target such as a via on a test sample. A metallization or thin film layer emits x-rays as a result of the scan. The x-ray emission intensity can be measured and compared against a control measurement. The information obtained can be used to characterize a void in the scan target.
Type:
Grant
Filed:
November 21, 2001
Date of Patent:
October 5, 2004
Assignee:
KLA-Tencor Technologies Corporation
Inventors:
Mehran Nasser-Ghodsi, Anne Testoni, Steve Oestreich