Abstract: A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
Type:
Grant
Filed:
November 5, 2004
Date of Patent:
April 10, 2007
Assignee:
Entegris, Inc.
Inventors:
John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes, Mark V. Smith