Abstract: Provided is a gas field ionization ion source capable of emitting heavy ions with high brightness which are suitable for processing a sample. The gas field ionization ion source according to the present invention includes a temperature controller individually controlling the temperature of the tip end of an emitter electrode (1) and the temperature of a gas injection port part (3) of a gas supply unit.

Abstract: A mass spectrometer comprising a controller configured to generate an RF signal to be applied to an electrode during the mass scan, wherein the electrode generates, based on the RF signal, an electric field to be applied to sample ions during a mass scan; an ion detector configured to detect sample ions passing through the electric field and generate a corresponding ion detection signal; and a sampling circuit configured to sample the ion detection signal; wherein the controller is configured to adjust a phase of the at least one RF signal relative to a sample timing of the sampling circuit and average successive mass scans to cancel a portion of the RF signal present in the ion detection signal.

Abstract: Provided are flow cell devices—referred to as nanoaquariums—that are microfabricated devices featuring a sample chamber having a controllable height in the range of nanometers to micrometers. The cells are sealed so as to withstand the vacuum environment of an electron microscope without fluid loss. The cells allow for the concurrent flow of multiple sample streams and may be equipped with electrodes, heaters, and thermistors for measurement and other analysis devices.

Abstract: The present disclosure discusses a system and method for continuous operation of an ion trap mass spectrometer. The described system does not introduce ions into the ion trap in distinct trapping phase, rather the described system continuously injects ions into the ion trap while continuously scanning out the ions. The system and method described herein achieves a much higher duty cycle and cycle rate when compared to standard mass spectrometer devices.

Abstract: A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.

Abstract: A composite charged particle beam apparatus includes a FIB column for irradiating a thin sample with a FIB and a GIB column for irradiating the thin sample with a GIB. The thin sample is placed on a sample stage, and a tilt unit tilts the thin sample about a tilt axis of the sample stage, the tilt axis being orthogonal to the FIB irradiation axis and being located inside a plane formed by the FIB irradiation axis and the GIB irradiation axis. A tilt sample holder is mounted on the sample stage and fixes the thin sample such that a cross-sectional surface of the thin sample is tilted at a constant angle with respect to the GIB irradiation axis and the azimuth angle of the GIB column can be changed by rotation of the sample stage.

Abstract: The present invention has an object to achieve soft ionization more easily when a slight amount of substance is ionized under an atmosphere pressure. The present invention provides an ionization method for a substance contained in a liquid, including: supplying the liquid to a substrate from a probe and forming a liquid bridge made of the liquid containing the substance dissolved therein, between the probe and the substrate; oscillating the substrate; and generating an electric field between an electrically conductive portion of the probe in contact with the liquid and an ion extraction electrode.

Abstract: A mass spectrometer comprises ion pulse means for producing ion pulses in a first vacuum chamber, ion trap means for receiving and trapping the ion pulses for mass analysis in a second vacuum chamber, and ion-optical lens means arranged between the ion pulse means and the ion trap means for receiving the ion pulses and outputting ions therefrom to the ion trap means. A first lens electrode and a second lens electrode collectively define an optical axis and are adapted for distributing a first electrical potential and second electrical potential therealong. Lens control means vary non-periodically with time the first electrical potential relative to the second electrical potential to control as a function of ion mass-to-charge ratio the kinetic energy of ions which have traversed the ion optical lens means. This controls the mass range of the ions receivable by the ion trap from the ion optical lens means.

Abstract: In a charged particle beam drawing apparatus, if at least one of calculating portions is free and at least one memory includes a free portion, a report that a next process can be additionally started by using at least one free calculating portion and the free portion of the memory, is transferred from a daemon to a writing control unit, and the next process is additionally started by the daemon on the basis of a start request transferred from the writing control unit to the daemon. If there is a possibility of a shortage of the calculating portions and the memory, and if a start request for starting a next process is transferred from the writing control unit to the daemon, the start request for starting the next process is refused by the daemon.

Abstract: A method of mass spectrometry is disclosed comprising performing a first analysis of a sample of ions wherein one or more parameters are scanned and/or ions are sorted according to one or more parameters during the first analysis. One or more ranges of interest of the one or more parameters from the first analysis are then automatically determined. A second subsequent analysis of the sample of ions is then automatically performed, wherein the second analysis is restricted to one or more of the ranges of interest of the one or more parameters.

Abstract: A selectable Coulomb aperture in charged particle system comprises a non-magnetic conductive plate with a plurality of holes therein. The plurality of holes has variant sizes or diameters to select different beam currents of primary beam in the charged particle system. The charged particle system may include a charged particle source for emitting a primary beam, a condenser lens for receiving the primary beam and condensing the primary beam, an objective lens for receiving the primary beam and focusing the primary beam on a surface of a specimen. The selectable Coulomb aperture is positioned between the charged particle source and the condenser lens.

Abstract: An abridged multipole structure for the transport and selection of ions along a central axis in a vacuum system is constructed from a plurality of rectilinear electrode structures, each having a substantially planar face with a first dimension and a second dimension perpendicular to the first dimension. When a voltage is applied across the second dimension, an electrical potential is produced at the planar face whose amplitude is a linear function of position along the second dimension. Two electrode structures can be arranged parallel to each other with the first dimension extending along the central axis or more electrodes structures can be arranged to form multipole structures with various polygonal cross sections.

Abstract: A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. Each of the first and second magnets including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, each annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.

Abstract: An ion guide is disclosed wherein an axial DC voltage barrier is created at the exit of the ion guide. A primary RF voltage is applied to the electrodes in order to confine ions radially within the ion guide. A supplemental RF voltage is also applied to the electrodes. The supplemental RF voltage has a greater axial repeat length than that of the primary RF voltage. The amplitude of the supplemental RF voltage is increased with time causing ions to become unstable and gain sufficient axial kinetic energy such that the ions overcome the axial DC voltage barrier. Ions emerge axially from the ion guide in mass to charge ratio order.

Abstract: An ion filter (10) for use in ion mobility spectrometry is described, together with a method for manufacturing the filter. The filter (10) is manufactured by removing portions from a monolithic structure to form a pair of electrodes which remain mechanically connected. The connecting portion (22) provides sufficient electrical impedance between the electrodes to effectively electrically separate the electrodes. The connecting portion may be doped or chemically modified to obtain a desired impedance, or this may be obtained through appropriate selection of physical dimensions.

Abstract: A radiation source generates extreme ultraviolet radiation for a lithographic apparatus as a chamber that is provided with a low pressure hydrogen environment. A trace amount of a protective compound, e.g., H2O, H2O2, O2, NH3 or NOx, is provided to the chamber to assist in maintaining a protective oxide film on metal, e.g., titanium, components in the chamber.

Abstract: Apparatuses are disclosed which include a discharge lamp configured to emit ultraviolet light, a power circuit configured to operate the discharge lamp, and a reflector system configured to redirect ultraviolet light emitted from the discharge lamp. In some embodiments, the apparatuses include a support structure containing the power circuit and supporting the discharge lamp. In some of such embodiments, the reflector system is configured to redirect ultraviolet light propagating away from the support structure to a region exterior to the apparatus and which is between approximately 2 feet and approximately 4 feet from a floor of a room in which the apparatus is arranged. In other embodiments, the reflector system may be additionally or alternatively configured to redirect ultraviolet light propagating away from the support structure to encircle an exterior surface of the apparatus. In any case, the reflector system may, in some embodiments, include a repositionable reflector.

Abstract: Electron beam sterilization equipment includes an outer-surface sterilization zone Z2 for sterilizing the outer surface of a container B by emitting electron beams when the container B is transported along circular paths L1 and L2; and an inner-surface sterilization zone Z3 for sterilizing the inner surface of the container B. An electron beam irradiator E1 is located near the upstream side of a 1-2 joint J1-2 of the circular paths L1 and L2 disposed in the outer-surface sterilization zone Z2, and a electron beam irradiator E2 is located near the downstream side of the joint. Thus, the electron beam irradiator E1 and the electron beam irradiator E2 are brought close to each other so as to sequentially sterilize the one half outer surfaces and the other half outer surface of the container B.

Abstract: An ion source apparatus for a mass spectrometer comprises a refractory metal filament operable to provide a flow of electrons by thermionic emission; an electrical current source electrically coupled to the filament for heating the filament; a vacuum chamber enclosing the filament; an ionization volume within the vacuum chamber capable of receiving the flow of electrons; a source of an oxygen-providing gas or gases; a restrictive fluidic coupling to the source of oxygen-providing gas or gases; and a gas conduit fluidically coupled to the restrictive fluidic coupling, the restrictive fluidic coupling and conduit operable to provide a flow of the oxygen-providing gas or gases into the vacuum chamber so as to maintain a partial pressure of said gas or gases within the vacuum chamber that is sufficiently high so as to inhibit the otherwise formation of a carbonaceous growth on the filament in the presence of a gaseous carbon-containing material.

Abstract: The present invention makes it possible, even when using an ordinary electron beam device (not an environment-controlled electron beam device), to create locally a low vacuum condition in the vicinity of a sample and cool said sample by means of a sample holder alone, without modifying the device or adding equipment such as a gas cylinder. The sample to be observed is placed in a sample holder provided with: a vessel that can contain a substance to serve as a gas source; and a through-hole in the bottom of a sample mount on said vessel. Via the through-hole, gas evaporating or volatilizing from the vessel is supplied to the sample under observation, thereby creating a localized low-vacuum state at or in the vicinity of the sample. Also, the heat of vaporization required for volatilization can be used to cool the sample.