Abstract: A semiconductor memory structure includes a substrate, a bit line disposed on the substrate, a dielectric liner disposed on a side of the bit line, and a capacitor contact and a filler disposed on the substrate. The bit line extends in a first direction. The dielectric liner includes a first nitride liner disposed on a sidewall of the bit line, an oxide liner disposed on a sidewall of the first nitride liner, and a second nitride liner disposed on a sidewall of the oxide liner. In a second direction perpendicular to the first direction, the capacitor contact is spaced apart from the bit line by the first nitride liner, the oxide liner, and the second nitride liner, and the width of the filler is greater than the width of the capacitor contact. A method for forming the semiconductor memory structure is also provided.

Abstract: Embodiments of the present application relate to the field of semiconductor manufacturing technologies, in particular to a semiconductor structure and a mask plate structure. The semiconductor structure includes a substrate, where the substrate is provided therein with active areas and a plurality of bit line structures arranged at intervals in parallel in the substrate. A plurality of word line structures are arranged at intervals in parallel in the substrate. The word line structures and the bit line structures intersect to define a plurality of grids arranged in an array on the substrate. Capacitor plugs are located in the grids. Projection of each of the capacitor plugs on the substrate covers a part of one of the active areas. Cross sections of the capacitor plugs are arcuate in a cross section parallel to a surface of the substrate.

Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductor substrate, a contact structure, a first conductive element, and a first dielectric spacer structure. The semiconductor substrate includes an active region and an isolation structure. The contact structure is on the active region of the semiconductor substrate. The first conductive element is on the isolation structure of the semiconductor substrate. The first dielectric spacer structure is between the contact structure and the first to conductive element. The first dielectric spacer structure has a first concave surface facing the first conductive element.

Abstract: The present application provides a memory device having a word line with an improved adhesion between a work function member and a conductive layer. The memory device includes a semiconductor substrate defined with an active area and including a recess extending into the semiconductor substrate, and a word line disposed within the recess, wherein the word line includes a first insulating layer disposed within and conformal to the recess, a conductive layer surrounded by the first insulating layer, a conductive member enclosed by the conductive layer, and a second insulating layer disposed over the conductive layer and conformal to the first insulating layer. A method of manufacturing the memory device is also disclosed.

Abstract: The present disclosure relates to a semiconductor structure and a method for manufacturing the same. The method includes: providing a base, at least one shallow trench isolating structure being formed in the base and several active regions arranged at an interval being isolated by the shallow trench isolating structure in the base; forming a first trench in the base, a part of the active regions being exposed in the first trench; forming a first conducting structure in the first trench; forming a first dielectric layer on the base; forming a second trench in the first dielectric layer, the first conducting structure being exposed in the second trench and a width of a top of the second trench being greater than a width of a top of the first trench; and forming a second conducting structure in the second trench.

Abstract: The present disclosure discloses a semiconductor device manufacturing method and a semiconductor device, relating to the technical field of semiconductors. The method includes: providing a semiconductor substrate, the semiconductor substrate comprising a shallow trench and active areas isolated from the shallow trench; forming an oxygen-containing layer on exposed outer surfaces of the shallow trench and the active areas; filling a first sacrificial layer of a set height in the shallow trench comprising the oxygen-containing layer on its surface; forming an etch stop layer on an upper surface of the first sacrificial layer; removing the first sacrificial layer below the etch stop layer to form an air gap; filling an isolation layer on the etch stop layer in the shallow trench to form a shallow trench isolation(STI) structure containing the air gap; and etching the active areas and the (STI) structure to form wordline trenches.

Abstract: The present disclosure provides a dynamic random access memory (DRAM) array. The memory array includes a semiconductor substrate, an isolation structure and contact enhancement sidewall spacers. The semiconductor substrate has a trench defining laterally separate active areas formed of surface regions of the semiconductor substrate. Top surfaces of a first group of the active areas are recessed with respect to top surfaces of a second group of the active areas. The isolation structure is filled in the trench and in lateral contact with bottom portions of the active areas. The contact enhancement sidewall spacers laterally surround top portions of the active areas, respectively.

Abstract: The invention discloses a semiconductor memory device, which is characterized by comprising a substrate defining a cell region and an adjacent periphery region, a plurality of bit lines are arranged on the substrate and arranged along a first direction, each bit line comprises a conductive part, and the bit line comprises four sidewalls, and a spacer surrounds the four sidewalls of the bit line, the spacer comprises two short spacers covering two ends of the conductive part, two long spacers covering the two long sides of the conductive part, and a plurality of storage node contact isolations located between any two adjacent bit lines, at least a part of the storage node contact isolations cover directly above the spacers. The structure of the invention can improve the electrical isolation effect, preferably avoid leakage current and improve the quality of components.

Abstract: The present disclosure discloses a semiconductor device and a method for manufacturing a semiconductor device. The method for manufacturing a semiconductor device includes following steps: providing a semiconductor substrate, and forming active regions and trench isolation structures in the semiconductor substrate, wherein the trench isolation structures are located between the active regions; forming first grooves in the active regions; filling the first grooves to form inversion polysilicon layers, the inversion polysilicon layers being inversely doped with the active regions; forming second grooves, the second grooves running through the polysilicon layers and a part of the semiconductor substrate, and reserving parts of the inversion polysilicon layers located on side faces of the second grooves; and, forming buried word line structures in the second grooves.