Abstract: An arrangement for holding a particle beam apparatus such as a transmission electron microscope. The arrangement is sufficient for receiving a good resolution in the area of 1 ? or less, said arrangement still being under more or less no influence of the environment, in particular, building vibrations. In one embodiment, the arrangement comprises a base structure comprising a plurality of hollow bodies, at least one of said hollow bodies having a first length extension in a first direction, a second length extension in a second direction and a third length extension in a third direction, said first length extension being larger than said second and third length extensions, and wherein a cross section of said at least one of said hollow bodies perpendicular to said first direction is substantially triangular. Due to the hollow body shape, a very stiff structure is provided with a very good eigenfrequency.

Abstract: An apparatus includes a semiconductor or dielectric wafer-substrate and first and second multi-layer structures located over the wafer-substrate. The first multi-layer structure includes an ionizer or an electronic ion detector. The second multi-layer structure includes an ion trap having entrance and exit ports. The ionizer or electronic ion detector has a port coupled to one of the ports of the ion trap.

Abstract: An ion source includes a plasma producing device, an ion extraction electrode having a first grid with a positive potential and a second grid with negative potential for extracting ions from a plasma excitation area of the plasma source device, and a communicating portion communicating the plasma excitation area with an outside thereof for removing an influence of the negative potential of the second grid with respect to electrons from the plasma excitation area.

Abstract: A device for separating particles according to their respective masses includes a substantially cylindrical wall of inner radius, “Rwall”, that surrounds a chamber and defines a longitudinal axis. A multi-species plasma having relatively cold ions is initiated at a first end of the chamber within a relatively small radius, “rsource”, from the longitudinal axis. A hollow cylinder having an outer radius, “Router”, is positioned at the second end of the chamber and centered on the axis. Cross electric and magnetic fields (E×B) are established in the chamber that are configured to send ions of relatively high mass on trajectories having a radial apogee, rapogee, that is greater than the cylinder's outer radius (r>Router). After reaching apogee, these ions lose energy and strike the cylinder where they are collected. Low mass ions are placed on small radius helical trajectories and pass through the hollow cylinder.

Abstract: The invention relates to the feeding of analyte ions, generated at atmospheric pressure, efficiently into the mass spectrometer. The invention provides a lengthy ion mobility drift tube with a focusing electric field inside to guide the ions from an ionization cloud generated at atmospheric pressure towards the entrance opening of the mass spectrometer, and to dry droplets which might occur in the ionization cloud by a hot drying gas flowing through the ion mobility drift tube towards the ionization cloud.

Abstract: The arrangement for generating EUV radiation based on electrically triggered gas discharges with high repetition rates and high average outputs.

Abstract: A particle-optical apparatus is disclosed which combines the functions of an energy selector 27 and a beam splitter 21. The particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beam 11 and a secondary electron beam 13.

Abstract: The present disclosure provides a device and method for exposing a person to ultraviolet radiation in tanning wavelengths which is emitted from a discharge lamp having a plurality of grooves formed in its outer periphery along a helical path. The discharge lamp includes, inter alia, an elongated vitreous tube, first and second electrode assemblies and a coating on the interior the interior of the tube. The coating is applied on an interior of the tube along the entire length for emitting ultraviolet radiation in tanning wavelengths when a voltage is applied across the first and second electrodes. In a first representative embodiment, the plurality of grooves are interconnected and the helical path is continuous. Alternatively, the plurality of grooves can be axially offset and the helical path can be discontinuous.

Abstract: An apparatus for producing an electron beam, comprising a support structure; a miniature ultrahigh vacuum chamber comprising a superconducting single walled metallic-type carbon nanotube comprised of a cylindrical wall, a proximal end disposed upon and sealed to the support structure, and a distal end comprising an electron-transparent structure; an electron beam emitting tip comprising a second carbon nanotube embedded in the support structure and disposed within the superconducting single walled metallic-type carbon nanotube, the second carbon nanotube having an inner surface with a thin conductive coating disposed thereupon; and means for creating an electrical potential difference the electron beam emitting tip and the cylindrical wall of said superconducting carbon nanotube.

Abstract: One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons using an electron source, biasing the specimen with respect to the electron source such that the incident electrons decelerate as a surface of the specimen is approached, and illuminating a portion of the specimen at a tilt with the beam of incident electrons. The specimen is moved under the incident beam of electrons using a movable stage of the inspection apparatus. Scattered electrons are detected to form image data of the specimen showing distinct contrast between regions of different magnetization. The movement of the specimen under the beam of incident electrons may be continuous, and data for multiple image pixels may be acquired in parallel using a time delay integrating detector.

Abstract: Systems and methods for mass spectrometry dynamic library searching are provided for use with mass spectrometer spectra. A composite spectrum is created from multiple spectra. The multiple spectra are collected at varying collision energies from a mass spectrometer. Dynamic searching algorithms are utilized for assigning a degree of importance to ions depending upon the identity of the ions, and for assigning a degree of importance to the ion ratios. A search is performed against a library of composite spectra that includes data for adduct, dimer, and oligomer ions. The systems and methods determine a match quality value that takes into account any or all ions in the spectrum along with the ions' ratios and degrees of importance.

Abstract: The present invention provides an ultimate analyzer which displays an element distribution image of an object with high contrast and high accuracy. A scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer is also provided. The ultimate analyzer comprises a scattered electron beam detector for detecting an electron beam scattered by an object; an electron spectrometer for energy dispersing an electron beam transmitted through the object; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector.

Abstract: A method and apparatus satisfying growing demands for improving the precision of angle of incidence of implanting ions that impact a semiconductor wafer and the precision of ribbon ion beams for uniform doping of wafers as they pass under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes. The design of the optical elements makes possible: (1) Broad-range adjustment of the width of a ribbon beam at the work piece; (2) Correction of inaccuracies in the intensity distribution across the width of a ribbon beam; (3) Independent steering about both X and Y axes; (4) Angle of incidence correction at the work piece; and (5) Approximate compensation for the beam expansion effects arising from space charge. In a practical situation, combinations of the elements allow ribbon beam expansion between source and work piece to 350 millimeter, with good uniformity and angular accuracy.

Abstract: A method and system for providing a texture to a surface of a workpiece is provided. The method comprises providing a workpiece to a texturizing chamber and scanning a beam of electromagnetic energy across the surface of the workpiece to form a plurality of features thereon. The features formed are generally depressions, protuberances, and combinations thereof. Also provided is a method of reducing contamination in a process chamber. The method comprises scanning a beam of electromagnetic energy across a surface of one or more process chamber components to form a plurality of features thereon, positioning the one or more chamber components into a process chamber, and initiating a process sequence within the process chamber.

Abstract: A polarity exchanger and ion implanter include a stripping canal for passing an ion beam therethrough, a gas supply unit for providing a stripping gas into the stripping canal to change a polarity of the ion beam, a gas circulation unit for circulating the stripping gas, a flow meter for measuring a flow rate of the stripping gas, an ammeter for measuring a driving current applied to the gas circulation unit for operating the gas circulation unit, and a monitoring unit for generating a control signal to control a process for changing the polarity of the ion beam in accordance with the measured flow rate of the stripping gas and the measured driving current. The polarity exchanger and ion implanter having the polarity exchanger may prevent generation of metallic contaminants caused by a flow rate variation of the stripping gas or deterioration of a component of the gas circulation unit.

Abstract: A germicidal lamp having a non-uniform contour increasing turbulence. An ultraviolet fluorescent lamp used in a purification system having a helical groove increasing turbulence of the fluid flow. The non-uniform contour may be placed directly on the tubular envelope forming the lamp or may be formed on a separate envelope enclosing a conventional cylindrical tubular germicidal lamp. The germicidal lamp having a non-uniform contour when placed in a fluid flow, such as water or air, creates turbulence, which improves the efficiency of the germicidal action. Smaller, more efficient purification systems requiring less exposure time are obtained.

Abstract: Disclosed is a capillary mixer for mixing first and second reactant solutions to form a mixed solution prior to delivering the mixed solution to an ion source of a mass spectrometer.

Abstract: This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.

Abstract: A member for holding at least one microfluidic device and providing an interface between the at least one microfluidic device and a second device is provided. The at least one microfluidic device has a plurality of reservoirs formed therein and the member includes a body having an upper face and a lower face and a plurality of open well members formed therein. Each well member is defined by a well wall and includes a first end and an opposing second end, wherein the second end is configured and dimensioned for frictionally engaging the at least one microfluidic device such that at least some of the open well members and the reservoirs of the microfluidic device align with one another. An apparatus for interfacing with a mass spectrometer to perform a nanospray application is also provided.

Abstract: A system and method for mass analysis of an ion beam. The system includes a mass selector, at least one multipole ion guide, and a mass analyzer. In the system and method, precursor ions are selected with a desired mass to charge ratio. Electrons are injected into the multipole ion guide. The precursor ions are fragmented into product ions via electron capture dissociation from the injected electrons. The product ions are passed to a mass analyzer for a mass analysis.