Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
Type:
Grant
Filed:
August 21, 2014
Date of Patent:
June 2, 2015
Assignee:
Intel Corporation
Inventors:
Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz