Abstract: The invention relates to a three-dimensional measurement system comprising a hardware part and a software part, in which the hardware part includes a mobile two-axis assembly (12) associated with a remote measurement device (13) installed on a fixed part (14), each axis being equipped with an angular encoder (22) restoring the direction of a sighting at any time, and in which the software part includes a control part at the input and an acquisition part at the output.

Abstract: The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.

Abstract: An optical system that includes a molded optical element having a non-uniform refractive index distribution due to molding and a method of manufacturing the optical system is disclosed. Data of the non-uniformity of the refractive index distribution associated with molding of the molded optical element is acquired and used in order to determine the form of an aspheric surface of the molded optical element for correcting aberrations caused by the non-uniformity of the refractive index distribution. This data may be acquired by measuring the refractive index distribution of an optical element molded based on initial design values that are based on assuming uniformity in the refractive index distribution of the molded optical element or it may be computed based on the form of the molded optical element. The optical element may include a concave optical surface and may be a lens element that includes an aspheric surface.

Abstract: The present invention is a system and method of conditioning the sample and surrounding environment of an exhaled breath sensor. It includes (i) using a particular molecular sieve for a triple purpose: (a) maintaining the sensor at a constant relative humidity during storage, (b) equilibrating the incoming breath stream to the same relative humidity as the sensor, and (c) eliminating the analyte from the environment around the sensor during storage. The present invention also includes removal of interfering components from the exhaled breath, such as carbon dioxide, as well as a thermal management technique.

Abstract: A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.

Abstract: A method of selection of an illuminator for use in an accelerated light stability test device chamber is described that employs measuring and comparing the spectral irradiance of at least one light source for use in an illuminated device and at least one illuminator suitable for use in an accelerated weathering chamber and selecting an illuminator having certain irradiance criteria. Also described are methods of accelerated light stability testing of an illuminated display components and an accelerated light stability tcst device.

Abstract: Disclosed is an apparatus and method for a compact, rugged, and inexpensive spectrometer that will make possible a range of new applications for optical spectroscopy including point-of-care medical devices, personal monitors, and ubiquitous environmental sensing. Embodiments of the disclosure include silicon photodetectors where incident light passes through a layer of an inexpensive, absorbing thin film. In one embodiment, one or more photodetectors may be used where a series of absorbing thin film layers are passed over the photodetectors. In another embodiment, an absorbing thin film layer is placed over one or more photodetectors where the absorptivity of the thin film layer is different for each photodetector.

Abstract: Fourier filters and wafer inspection systems are provided. One embodiment relates to a one-dimensional Fourier filter configured to be included in a bright field inspection system such that the bright field inspection system can be used for broadband dark field inspection of a wafer. The Fourier filter includes an asymmetric illumination aperture configured to be positioned in an illumination path of the inspection system. The Fourier filter also includes an asymmetric imaging aperture complementary to the illumination aperture. The imaging aperture is configured to be positioned in a light collection path of the inspection system such that the imaging aperture blocks light reflected and diffracted from structures on the wafer and allows light scattered from defects on the wafer to pass through the imaging aperture.

Abstract: The invention relates to a system and method of detecting impurities in a cylindrically shaped transparent medium, wherein the cylindrically shaped transparent medium is illuminated with electromagnetic radiation, and the radiation having components emerging radially from the medium, and at least some of the components are received by a detector for detecting impurities of the medium. The components are detected at a multiplicity of relative angular positions around the symmetry axis of the cylinder, so as to form an impurity diagram that may be analyzed to detect and measure impurities in the medium.

Abstract: An evaluation apparatus which evaluates a sample having a porous layer. The apparatus includes a light source which irradiates the sample with light, an imaging spectrometer which spectroscopically measures light reflected by the sample and senses an image, a first calculator which obtains amplitude information on an amplitude of a spectral reflectance of the sample based on the image sensed by the imaging spectrometer, a memory which holds in advance relationship information representing a relationship between amplitude information of spectral reflectance of a member having a porous layer and an absorption coefficient of the porous layer of the member, and a second calculator which obtains an absorption coefficient of the sample based on the amplitude information obtained by the first calculator and the relationship information held in the memory.

Abstract: The contents of a liquid medium are determined using a light source and an optical detector, for example a spectrometer. A longitudinally displaceable piston sucks the medium into a cylindrical glass measuring chamber and evacuates the liquid from the chamber. At least one measuring beam is directed through the medium, and at least one reference beam is directed outside the medium. The piston has cleaning/sealing rings mounted on its outer periphery which rub against an inner surface of the glass measuring chamber as the piston travels, to clean the surface.

Abstract: An optical displacement measurement device for introducing light from a light source to an object through an optical system having an objective lens and for detecting light reflected from the object by a detection section to thereby measure a displacement of the object relative to the objective lens. In the optical displacement measurement device, the objective lens is a conical lens for advancing the light toward the object and for receiving light reflected from the object to direct to the detection section, and the displacement of the object relative to the objective lens is measured in consideration of the property that a shape of an detected image detected by the detection section varies depending on the displacement of the object relative to the objective lens.

Abstract: An optical metrology system includes model approximation logic for generating an optical model based on experimental data. By eliminating theoretical model generation, in which the fundamental equations of a test sample must be solved, the model approximation logic significantly reduces the computational requirements of the metrology system when measuring films formed on patterned base layers. The experimental model can be created by selecting an expected mathematical form for the final model, gathering experimental data, and compiling a lookup model. The lookup model can include the actual measurement data sorted by output (attribute) value, or can include “grating factors” that represent compensation factors that, when applied to standard monolithic model equations, compensate for the optical effects of grating layers.

Abstract: A circularizated semiconductor laser diode (CSLD), such as for example a vertical cavity surface emitting laser (VCSEL) may be used for optical measurements. The CSLD may be used in a cell density probe to perform cell density determination and/or turbidity determination, such as in a biotech, fermentation, or other optical absorbance application. The cell density probe may comprise a probe tip section made from a polytetrafluoroethylene material, which provides sealability, ease of manufacture, durability, cleanability, optical semi-transparency at visible and near infrared wavelengths, and other advantages. The probe tip advantageously provides an optical gap that allows for in situ measurements of optical measurements including but not limited to absorbance, scattering, and fluorescence.

Abstract: A swept-angle SPR measurement system deflects an optical beam over a range of deflection angles according to a control signal and maps the deflected beam to a target within a range of incidence angles that corresponds to the range of deflection angles.

Abstract: In order to provide a quality evaluation apparatus having excellent measurement accuracy in obtaining quality evaluation values of fruits and vegetables, transmitted light from one or more measured objects is received by a photo-detective sensor of the charge storage type, charges are stored in the photo-detective sensor until a predetermined charge storage time lapses from start of the charge storage, a charge storage discharge process is repeatedly executed for releasing the charges stored in the photo-detective sensor until lapse of a predetermined discharge time, the stored charges are released when the measured object reach a position for measurement, and a measurement charge storage process is executed for storing charges to be used as photo-detective information for quality evaluation.

Abstract: A device for detecting surface defects (2) on the neck ring (3) of a container comprises: a light source (5) illuminating, by means of an incident light beam, a section of the surface of the neck ring of the container, along a determined incident direction (Di), at least one linear sensor (10) measuring light beams, arranged to receive the light beam reflected by the surface defect, the angle (?) between the incident (Di) and reflection (Dr) directions lying between 15 and 45°, preferably in the order of 30°, one of the directions being parallel to the axis of revolution of the container, means (15) for ensuring the rotation of the container about the axis of revolution through at least one rotation, and a unit (16) for analysing and processing light beams received by the linear sensor, to identify the presence of a surface defect.

Abstract: A measurement apparatus measures the spatial distributed characteristic of reflection of an object. Evaluate parameters used to evaluate the gloss character of the object are extracted based on the measurement result. An evaluate value indicating the gloss character of the object is calculated based on the extracted evaluate parameters. The calculated evaluate value is visually displayed on at least a two-dimensional space specified by the evaluate parameters.

Abstract: A substrate alignment apparatus which aligns and fixes a substrate on a substrate stage includes a chucking pad fixed on the substrate stage to chuck and fix the substrate, a moving unit which moves the substrate with respect to the substrate stage such that a mark on the substrate stage and a mark on the substrate coincide with each other, and a determination unit which evaluates and controls a relative position between the chucking pad and the substrate after movement by the moving unit and determines whether the chucking pad can normally chuck the substrate.

Abstract: A method and apparatus for measuring the relative positions of first and second components, comprising: mounting first and second measurement units on respective housings forming part of each component and which are rotatably arranged and infinitely adjustable thereon in respective brackets for defining first and second adjustably selected rotational axes, respectively; measuring the relative positions of the components in first and second states of operation by detecting the relative positions of those selected axes in each state of operation and producing measurement values determinative of those relative positions.