Patents Examined by Jeremy J Joy
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Patent number: 11594637Abstract: Gate-all-around integrated circuit structures having fin stack isolation, and methods of fabricating gate-all-around integrated circuit structures having fin stack isolation, are described. For example, an integrated circuit structure includes a sub-fin structure on a substrate, the sub-fin structure having a top and sidewalls. An isolation structure is on the top and along the sidewalls of the sub-fin structure. The isolation structure includes a first dielectric material surrounding regions of a second dielectric material. A vertical arrangement of horizontal nanowires is on a portion of the isolation structure on the top surface of the sub-fin structure.Type: GrantFiled: March 27, 2020Date of Patent: February 28, 2023Assignee: Intel CorporationInventors: Leonard P. Guler, Stephen Snyder, Biswajeet Guha, William Hsu, Urusa Alaan, Tahir Ghani, Michael K. Harper, Vivek Thirtha, Shu Zhou, Nitesh Kumar
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Patent number: 11581318Abstract: A method of manufacturing a semiconductor device includes forming a first pattern structure having a first opening and a second pattern structure having a second opening on a substrate, forming a gap fill layer in the second opening, forming fences and contact structures in the first opening, removing the gap fill layer in the second opening, forming an upper conductive layer to cover the first and second pattern structures, the fences, and the contact structures, forming a mask pattern based on a photolithography process using the second pattern structure covered by the upper conductive layer as an align mark, and etching the upper conductive layer using the mask pattern to form upper conductive patterns. A width of the second opening is larger than a width of a first opening. A thickness of the upper conductive layer is smaller than a depth of the second opening.Type: GrantFiled: April 22, 2021Date of Patent: February 14, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Hye Sung Park, Jong Hyuk Park, Jin Woo Bae, Bo Un Yoon, Il Young Yoon, Bong Sik Choi
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Patent number: 11574982Abstract: A slit has ends each close to one of a display area and a terminal. The ends are each formed of a stepwise side face, including etch stop films.Type: GrantFiled: January 31, 2018Date of Patent: February 7, 2023Assignee: SHARP KABUSHIKI KAISHAInventors: Tohru Okabe, Ryosuke Gunji, Hiroki Taniyama, Shinji Ichikawa, Takeshi Yaneda, Hiroharu Jinmura, Yoshihiro Nakada, Akira Inoue
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Patent number: 11574895Abstract: A method of manufacturing an electronic device, comprising: providing a carrier substrate with a plurality of light-emitting units disposed thereon, the plurality of light-emitting units being spaced with a first pitch (P1) in a first direction and a second pitch (P2) in a second direction that is perpendicular to the first direction; providing a driving substrate; and transferring at least a portion of the plurality of light-emitting units to the driving substrate to form a transferred portion of the plurality of light-emitting units on the driving substrate, the transferred portion being spaced with a third pitch (P3) in a third direction and a fourth pitch (P4) in a fourth direction that is perpendicular to the third direction; wherein the first pitch (P1), the second pitch (P2), the third pitch (P3), and the fourth pitch (P4) are satisfied following relations: P3=mP1; and P4=nP2, m and n are positive integers.Type: GrantFiled: December 19, 2019Date of Patent: February 7, 2023Assignee: INNOLUX CORPORATIONInventors: Jia-Yuan Chen, Tsung-Han Tsai, Kuan-Feng Lee, Yuan-Lin Wu
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Patent number: 11532750Abstract: A device includes a fin extending from a substrate; a gate stack over and along sidewalls of the fin; a gate spacer along a sidewall of the gate stack; an epitaxial source/drain region in the fin and adjacent the gate spacer, the epitaxial source/drain region including a first epitaxial layer on the fin, the first epitaxial layer including silicon and arsenic; and a second epitaxial layer on the first epitaxial layer, the second epitaxial layer including silicon and phosphorus, the first epitaxial layer separating the second epitaxial layer from the fin; and a contact plug on the second epitaxial layer.Type: GrantFiled: July 28, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Li-Li Su, Wei-Min Liu, Wei Hao Lu, Chien-I Kuo, Yee-Chia Yeo
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Patent number: 11527658Abstract: A novel material and a transistor including the novel material are provided. One embodiment of the present invention is a composite oxide including at least two regions. One of the regions includes In, Zn and an element M1 (the element M1 is one or more of Al, Ga, Si, B, Y, Ti, Fe, Ni, Ge, Zr, Mo, La, Ce, Nd, Hf, Ta, W, Mg, V, Be, and Cu) and the other of the regions includes In, Zn, and an element M2 (the element M2 is one or more of Al, Ga, Si, B, Y, Ti, Fe, Ni, Ge, Zr, Mo, La, Ce, Nd, Hf, Ta, W, Mg, V, Be, and Cu). In an analysis of the composite oxide by energy dispersive X-ray spectroscopy, the detected concentration of the element M1 in a first region is less than the detected concentration of the element M2 in a second region, and a surrounding portion of the first region is unclear in an observed mapping image of the energy dispersive X-ray spectroscopy.Type: GrantFiled: December 3, 2020Date of Patent: December 13, 2022Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 11508810Abstract: The present disclosure relates to semiconductor structures and, more particularly, to high voltage diode structures and methods of manufacture. The structure includes: a diode structure composed of first well of a first dopant type in a substrate; and a well ring structure of the first dopant type in the substrate which completely surrounds the first well of the first dopant type, and spaced a distance “x” from the first well to cut a leakage path to a shallower second well of a second dopant type.Type: GrantFiled: November 13, 2020Date of Patent: November 22, 2022Assignee: GLOBALFOUNDRIES INC.Inventors: Jagar Singh, Shiv Kumar Mishra
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Patent number: 11495760Abstract: A display device including a display panel having a display area and a non-display area, the non-display area being disposed at a peripheral portion of the display area and having a bending area; an integrated circuit (IC) disposed in the non-display area to drive the display panel; a first layer formed between the display area and the IC and covering the bending area; and a first member covering the IC and the first layer and overlapping with the bending area.Type: GrantFiled: December 14, 2020Date of Patent: November 8, 2022Assignee: Samsung Display Co., Ltd.Inventor: Kyu Bong Jung
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Patent number: 11489034Abstract: In the second area, the lower base surface of the wirings is in contact with the first inorganic insulating film including a stepped portion including upper surfaces having mutually different heights and being adjacent to each other in the second direction, and a stepped surface rising from the upper surfaces except the uppermost surface. The first inorganic insulating film constitutes at least the upper surfaces except the lowest surface, and the stepped surface. The adjacent wirings include a pair of convex portions protruding toward a direction facing each other. One and the other of the pair of convex portions are separated to face each other at a position where the stepped portion does not exist in the second area in the first inorganic insulating film.Type: GrantFiled: April 20, 2020Date of Patent: November 1, 2022Assignee: Japan Display Inc.Inventor: Hiroshi Tabatake
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Patent number: 11489138Abstract: A display device includes a base layer including a first portion and a second portion disposed around the second portion; a display unit disposed on a first surface of the first portion and including a light emitting element; a driving circuit disposed on a first surface of the second portion and including a driving chip; a support member attached to a second surface of the first portion and a second surface of the second portion; and an adhesive member disposed between the base layer and the support member, wherein the adhesive member includes a first adhesive member having a first elastic modulus and a second adhesive member having a second elastic modulus that is higher than the first elastic modulus, and the second adhesive member overlaps the driving circuit.Type: GrantFiled: November 18, 2020Date of Patent: November 1, 2022Inventor: Dae Geun Lee
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Patent number: 11489056Abstract: The present disclosure describes a semiconductor device that includes a substrate and a first transistor on the substrate. The first transistor includes a first gate structure and the first gate structure includes a gate dielectric layer and a first work function layer on the gate dielectric layer. The first gate structure also includes a capping layer on the first work function layer. The semiconductor device also includes a second transistor on the substrate, in which the second transistor includes a second gate structure. The second gate structure includes the gate dielectric layer and a second work function layer on the gate dielectric layer. The second gate structure also includes the first work function layer on the second work function layer and the silicon capping layer on the first work function layer.Type: GrantFiled: February 10, 2020Date of Patent: November 1, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Liang Cheng, Peng-Soon Lim, Ziwei Fang, Huang-Lin Chao
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Patent number: 11476236Abstract: A display apparatus including a flexible substrate, a plurality of light emitting devices spaced apart from one another and disposed on the flexible substrate, and a light shielding layer disposed between the light emitting devices, and partially covering the light emitting devices to define light extraction surfaces, in which a distance between adjacent light extraction areas is the same.Type: GrantFiled: November 5, 2019Date of Patent: October 18, 2022Assignee: SEOUL VIOSYS CO., LTD.Inventor: Chung Hoon Lee
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Patent number: 11469243Abstract: Embodiments of 3D memory devices having a pocket structure in memory strings and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a selective epitaxial layer on the substrate, a memory stack including interleaved conductive layers and dielectric layers on the selective epitaxial layer, and a memory string including a channel structure extending vertically in the memory stack and a pocket structure extending vertically in the selective epitaxial layer. The memory string includes a semiconductor channel extending vertically in the channel structure, and extending vertically and laterally in the pocket structure and in contact with the selective epitaxial layer.Type: GrantFiled: January 23, 2020Date of Patent: October 11, 2022Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventor: Yonggang Yang
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Patent number: 11469326Abstract: Embodiments of the present disclosure relate to an un-doped or low-doped epitaxial layer formed below the source/drain features. The un-doped or low-doped epitaxial layer protects the source/drain features from damage during replacement gate processes, and also prevent leakage currents in the mesa device. A semiconductor device is disclosed. The semiconductor device includes an epitaxial feature having a dopant of a first concentration, and a source/drain feature in contact with the epitaxial feature. The source/drain feature comprises the dopant of a second concentration, and the second concentration is higher than the first concentration.Type: GrantFiled: September 18, 2020Date of Patent: October 11, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shih-Cheng Chen, Zhi-Chang Lin, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao, Kuo-Cheng Chiang, Chih-Hao Wang
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Patent number: 11437372Abstract: A semiconductor device includes a fin structure over a substrate. The fin structure includes a bottom portion and a top portion. The bottom and the top portions have different materials. The device also includes a liner layer on a sidewall of the bottom portion, a dielectric layer on side surfaces of the liner layer, an interfacial layer, and a gate structure over the dielectric layer and engages the fin structure. A top surface of the liner layer extends below a bottom surface of the top portion. The interfacial layer has a first section on and directly contacting sidewall surfaces of the bottom portion and a second section on and directly contacting top and sidewall surfaces of the top portion. The gate structure includes a high-k dielectric layer and a metal gate electrode over the high-k dielectric layer. The high-k dielectric layer directly contacts the first section of the interfacial layer.Type: GrantFiled: July 24, 2020Date of Patent: September 6, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsung-Chieh Hsiao, Johnson Chen, Tzung-Yi Tsai, Tsung-Lin Lee, Yen-Ming Chen
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Patent number: 11424335Abstract: Group III-V semiconductor devices having dual workfunction gate electrodes and their methods of fabrication are described. In an example, an integrated circuit structure includes a gallium arsenide layer on a substrate. A channel structure is on the gallium arsenide layer. The channel structure includes indium, gallium and arsenic. A source structure is at a first end of the channel structure and a drain structure is at a second end of the channel structure. A gate structure is over the channel structure, the gate structure having a first workfunction material laterally adjacent a second workfunction material. The second workfunction material has a different workfunction than the first workfunction material.Type: GrantFiled: September 26, 2017Date of Patent: August 23, 2022Assignee: Intel CorporationInventors: Sean T. Ma, Willy Rachmady, Gilbert Dewey, Cheng-Ying Huang, Dipanjan Basu
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Patent number: 11411096Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. A nanowire transistor may include a channel region including a nanowire above a substrate, a source electrode coupled to a first end of the nanowire through a first etch stop layer, and a drain electrode coupled to a second end of the nanowire through a second etch stop layer. A gate electrode may be above the substrate to control conductivity in at least a portion of the channel region. A first spacer may be above the substrate between the gate electrode and the source electrode, and a second spacer may be above the substrate between the gate electrode and the drain electrode. A gate dielectric layer may be between the channel region and the gate electrode. Other embodiments may be described and/or claimed.Type: GrantFiled: December 28, 2017Date of Patent: August 9, 2022Assignee: Intel CorporationInventors: Karthik Jambunathan, Biswajeet Guha, Anand S. Murthy, Tahir Ghani
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Patent number: 11410889Abstract: In a method of manufacturing a semiconductor device, semiconductor layers, which are vertically arranged with a space between adjacent semiconductor layers, are provided over a substrate, an interfacial layer is formed around each of the semiconductor layers, a dielectric layer is formed on the interfacial layer around each of the semiconductor layers, a first conductive layer is formed on the dielectric layer, the first conductive layer is removed so that the dielectric layer is exposed, a second conductive layer is formed on the exposed dielectric layer so that the space between adjacent semiconductor layers is not fully filled by the second conductive layer, a third conductive layer is formed on the second conductive layer so that the space between adjacent semiconductor layers is filled by the third conductive layer, and the semiconductor layers are semiconductor wires or sheets.Type: GrantFiled: July 24, 2020Date of Patent: August 9, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Chieh Wang, Yueh-Ching Pai
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Patent number: 11398552Abstract: High-voltage semiconductor device and method of forming the same, the high-voltage semiconductor device includes a substrate, a gate structure, a drain, a first insulating structure and a drain doped region. The gate structure is disposed on the substrate. The drain is disposed in the substrate, at one side of the gate structure. The first insulating structure is disposed on the substrate, under the gate structure to partially overlap with the gate structure. The drain doped region is disposed in the substrate, under the drain and the first insulating structure, and the drain doped region includes a discontinuous bottom surface.Type: GrantFiled: August 26, 2020Date of Patent: July 26, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Wen-Hsin Lin, Shin-Chen Lin, Yu-Hao Ho, Cheng-Tsung Wu, Chiu-Hao Chen
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Patent number: 11398479Abstract: An integrated circuit includes: a germanium-containing fin structure above a layer of insulation material; a group III-V semiconductor material containing fin structure above the layer of insulation material; a first gate structure on a portion of the germanium-containing fin structure; a second gate structure on a portion of the group III-V semiconductor material containing fin structure; a first S/D region above the layer of insulation material and laterally adjacent to the portion of the germanium-containing fin structure, the first S/D region comprising a p-type impurity and at least one of silicon or germanium; a second S/D region above the layer of insulation material and laterally adjacent to the portion of the group III-V semiconductor material containing fin structure, the second S/D region comprising an n-type impurity and a second group III-V semiconductor material; and a layer comprising germanium between the layer of insulation material and the second S/D region.Type: GrantFiled: December 29, 2017Date of Patent: July 26, 2022Assignee: Intel CorporationInventors: Willy Rachmady, Abhishek A. Sharma, Ravi Pillarisetty, Patrick Morrow, Rishabh Mehandru, Aaron D. Lilak, Gilbert Dewey, Cheng-Ying Huang