Patents Examined by Jesse A. Fanty
  • Dielectric layer liner for an integrated circuit structure
    Patent number: 6774489
    Abstract: An integrated circuit structure (8) includes a plurality of solid state electronic devices and a plurality of conductive elements (12, 14) that electrically couple the electronic devices. The integrated circuit structure (8) also includes a dielectric layer (16) positioned between two or more of the conductive elements (12, 14). A liner (18) is positioned between at least a portion of the dielectric layer (16) and a conductive element (12, 14). The liner (18) is formed from a compound that includes silicon and either carbon and nitrogen.
    Type: Grant
    Filed: August 23, 2001
    Date of Patent: August 10, 2004
    Assignee: Texas Instruments Incorporated
    Inventors: Steven W. Russell, Wei William Lee