Abstract: A low profile opto-device panel assembly suitable for use in an input detection apparatus used as an input device in conjunction with a visual display is disclosed. Arrays of light emitting devices and light detecting devices are juxtaposed along the internal edge of a peripheral frame printed circuit board to reduce the overall height of the panel assembly. Alignment housings surrounding each of the arrays of opto-devices are attached to the printed circuit board and extend inwardly of the sides of the peripheral frame printed circuit board. The opto-devices disposed in the alignment housings along the internal edge of the printed circuit boards are mechanically and electrically interconnected to the printed circuit board by bent leads which extend along the upper surface of the printed circuit board and into conventional printed circuit board holes.

Abstract: An image sensor having first wires formed in parallel on a first region of a substrate; a semiconductor layer formed on the first region covering the first wires and on a second region of said substrate; first electrodes arranged in line, connecting to the semiconductor layer of said second region; second electrodes arranged in line and connected to the semiconductor layer of said second region, and second wires extended from the first electrodes, the second wires connecting the first electrodes to said first wires at through holes formed in said semiconductor layer. The second electrodes are formed as a common electrode, and each of the first electrode, together with a portion of the second electrode facing the first electrodes and the semiconductor layer forming a photo-sensing element.

Abstract: Device for the contact-free measurement of a distance from a surface, particularly for scanning the contour of a surface of a workpiece along a given measuring path, comprising a measuring body enclosing optoelectronic means for transmitting light to the surface to be measured and converting the light reflected by such surface into an electrical signal as a function of the distance from the surface. The measuring body is supported on a stand and is movable in the direction of measurement. The optoelectronic means comprise a focus position measuring system and an optoelectronic position scanning unit for scanning the position of the measuring body relative to the supporting stand.

Abstract: The quality of rail wheels still attached to a rail vehicle or removed from the rail vehicle, is automatically monitored and measured for correction purposes as a rail vehicle or even an entire train passes through a measuring range. The measuring range includes auxiliary rails providing a running or reference plane, at least one diameter sensing device and at least one wheel tread profile quality sensing device. Both sensing devices can perform their function while a wheel or wheels are travelling through the measuring range. Signals provided by the sensing devices are supplied to signal processing and evaluating circuits which may provide a signal record and/or control signals for a wheel truing operation.

Abstract: A method of forming a three-dimensional stereo vision is disclosed in which, in order to prevent the erroneous detection of an object point in the conventional method using two image focusing lens systems, three image points of an object point formed by logically and/or physically selecting three image focusing lens systems and three image sensing surfaces from a multiplicity of image points on an image sensing surface by using the fact that a positional relation among three image points of the same object point is similar to the positional relation among the three image focusing lens systems, and the positional information of three selected image points on the image sensing surface is used for obtaining three-dimensional distance information of the object point.

Abstract: A proximity sensing system and signal processing method are disclosed for detecting target objects from a movable vehicle while protecting against false target detection due to the presence of fog, clouds, or other aerosols. One or more target detectors are alternately disposed adjacent to one or more guard detectors so the edges of the fields of view are immediately adjacent. A collimated laser beam is projected away from the vehicle by a transmitter along an axis which intersects at an angle with the adjacent fields of view defining active areas in which the beam will be reflected from objects. Signals generated from any beam reflections to a target detector are made positive while signals generated by any beam reflections to a guard detector are made negative with respect to a threshold reference. The signals are summed in a differential amplifier and the resultant signal presented to a digital comparator.

Abstract: In a light sensor with a housing (19) the light transmitter (17, 20) and the light receiver (12, 15) are arranged alongside one another. The received light beam (11) is deflected behind the front receiving lens (12) onto a photoelectric converter arrangement (15) via a deflecting mirror (14) which is pivotable about a transverse axis (13) and it is possible to change the sensing distance by pivoting the deflecting mirror (14).

Abstract: A sheet processing apparatus comprises conveyor belts for conveying a plurality of supplied sheets one by one and optical detecting units for optically detecting sheets conveyed in the convey belts, and performs predetermined processing while the sheets are being conveyed by the conveyor belts. The apparatus further comprises cleaning pads, provided in the apparatus, for cleaning the optical detecting units and cleaning actuating units, provided in the apparatus, for actuating the cleaning pads to clean the optical detecting units.

Abstract: To align a grating on a mask with respect to an equivalent grating of a wafer in a photolithographic system where the mask is imaged by an imaging system onto the wafer, symmetrical diffraction orders (u.degree..sub.+1, u.degree..sub.-1) are focussed on the wafer grating and diffracted a second time to return colinear with the optical axis and to be deflected by a beam splitter to a photo detector. The intensity of the superimposed outbeams depends on the relative phase differences of the diffracted beams, and, hence, on the displacements of the mask and wafer gratings. The phase of the electrical output signal is determined by introducing periodic phase differences in the diffracted beams of the mask grating by a wobbling parallel glass plate. For simultaneous X-, Y- alignment, crossed gratings are used that operate on two pairs of diffracted beams. The polarization direction of one of these pairs is rotated by 90.degree.

Abstract: A device which monitors the characteristics of an image cast upon a radiation sensitive substrate. This includes a shadow casting object or mask and at least one source of radiation disposed above the object or mask so that the image cast on the substrate can be analyzed.

Abstract: A projection type exposure apparatus for projecting an original pattern formed on a mask onto a substrate, which comprises a projection optical system, a lens tube member for holding the projection optical system, an alignment optical system and a battle wall member disposed along the path of the projection light beam in the space between the mask and the projection optical system for shutting the space from the flow of external air.

Abstract: A position measuring instrument, comprising a scanning grid, a scale grid and an illumination unit, is used to produce two sets of diffracted partial light rays. The scanning grid defines a grid constant and is formed by two scanning fields, constructed as phase grids, offset to one another in the measuring direction by 1/4 of the grid constant. The phase grids have a slat-to-furrow width ratio that deviates from a 1:1 ratio. The scale grid has the same grid constant as the scanning grid but has a slat-to-furrow ratio of 1:1. The grids cooperate with the illumination unit to produce diffracted partial light rays of several orders. An oppositely deflecting prism is allocated to each scanning field. A first and second set of diffracted partial light rays are generated, wherein the second set is opposite in phase to the first set. A photodetector is allocated to each respective selected order of the two sets of light rays to produce corresponding electrical signals.

Abstract: A photodetection type coordinate input device includes a frame having a substantially rectangular opening formed in the center, a light-emitting element array composed of a plurality of light-emitting elements disposed along each of the two sides of the opening of the frame, a light-receiving element array composed of a plurality of light-receiving elements disposed along each of the two sides which respectively oppose the first two sides, and a filter provided in a part or the whole area of the opening and adapted to transmit desired light alone. The opening of the frame is disposed in front of a display to form a plurality of optical paths by pairs of light-emitting and -receiving elements, respectively, in front of the display screen of the display, and a position at which optical paths are blocked is detected to specify a coordinate position on the display screen, thereby inputting the coordinate position.

Abstract: A precision optical tracking, stabilization, focusing, and information receiving system is described. This invention is designed to improve optical systems in two important areas. The first application is in systems that require both reception of information and target tracking using a single beam. A transparent pyramid with a truncated vertex (frustum of a pyramid) is used to split a beam into 5 parts. The central axial part is used as an information carrier, and the other four are used for tracking. The second application is for precise focusing. The light beam is focused onto the vertex of a frustum of a pyramid and the intensity of the central fraction of the beam, as compared with the side fractions, decreases as the focal point is moved away from the surface of the pyramid in either direction.

Abstract: In an opto-mechanical scanner combining scanning and ranging functions the scanning beam, obtained from line-scanning means and frame-scanning means, and the ranging beam converge on a scanning detector array and a ranging detector, respectively. In accordance with the invention, the scanning beams and the ranging beams traverse an arrangement of fixed optical elements which are arranged to ensure that the beam each follow two different optical paths such that the ranging beam bypasses the line-scanning means. This ensures that the ranging beam has a fixed spatial orientation which is independent of the line-scanning means.