Abstract: Provided is a top ring that ensures uniformly pressing a substrate against a polishing pad. A top ring 302 for holding a substrate WF includes a base member 301 coupled to a top ring shaft 18, an elastic film 320 that is mounted to the base member 301 and forms a pressurization chamber 322 for pressurizing the substrate WF between the base member 301 and the elastic film 320, a substrate suction member 330 that includes a porous member 334 including a substrate suction surface 334a for suctioning the substrate WF and a pressure reducing portion 334b communicating with a pressure reducing unit 31. The substrate suction member 330 is held to the elastic film 320.

Abstract: A chemical mechanical polishing apparatus includes a rotatable platen to hold a polishing pad, a rotatable carrier to hold a substrate against a polishing surface of the polishing pad during a polishing process, a polishing liquid supply port to supply a polishing liquid to the polishing surface, a thermal control system including a movable nozzle to spray a medium onto the polishing surface to adjust a temperature of a zone on the polishing surface, an actuator to move the nozzle radially relative to an axis of rotation of the platen, and a controller configured to coordinate dispensing of the medium from the nozzle with motion of the nozzle across the polishing surface.

Abstract: A jig for a cover window may include a lower jig and an upper jig on the lower jig. The lower jig may include a mounting portion, on which a cover window is configured to be disposed, and an exhausting portion adjacent to the mounting portion. The upper jig may include a cover unit, in which an opening exposing the mounting portion is defined, and a sidewall portion, coupled to the cover unit and enclosing the lower jig. The cover unit may be spaced apart from and overlapped with the exhausting portion.

Abstract: A torque structure includes a first body, a second body, an elastic member, and a locking set. The first body has a receiving chamber. The second body is provided with a drive portion, a plurality of first securing portions, and a first end face. The locking set includes a locking member, a plurality of securing members, a plurality of balls, and a washer. The locking member is provided with a pivot portion, a plurality of second securing portions, and a second end face. The securing members are mounted in the first securing portions and the second securing portions. The washer is mounted on the locking member elastically biased between the first end face and the second end face to space the second body from the locking member. The washer eliminates a gap between the locking member and the second body.

Abstract: A polishing pad conditioning apparatus according to an example embodiment of the present inventive concept includes an apparatus body, a pivot arm provided on the apparatus body and including a housing having an internal space and provided at a distal end portion of the pivot arm and a head unit disposed at the distal end portion of the pivot arm. The head unit includes: a rotary motor provided in the internal space of the housing, the rotary motor including a rotary shaft; a foreign material blocking member connected to the rotary shaft; a disk holder connected to the rotary shaft; and a conditioning disk coupled to the disk holder. The foreign material blocking member includes a fluid flow groove configured to guide a movement of fluid for preventing foreign objects from entering the housing on an outer surface of the foreign material blocking member.

Abstract: A surface cleaning apparatus has a suction motor actuator that is actuatable to actuate the suction motor to operate in a first mode of operation and to operate in a second mode of operation, the first mode of operation defining a first discrete power level for the suction motor and the second mode of operation defining a second discrete power level for the suction motor. The first mode of operation is enabled when the first power pack having a first level of power is provided to power the surface cleaning apparatus and the second mode of operation is not enabled until a second power pack is provided such that the surface cleaning apparatus has a second level of on board power that is greater than the first level of on board power.

Abstract: A dismantlable portable sawhorse utilizes a bracket plate having a plank aperture and a support aperture that have lengths that are substantially orthogonal to each other and intersect to form a continuous aperture having an intersection space. The plank and support apertures are configured to receive various arrangements of plank lumber and support lumber, respectively. The bracket plate also has a front and back leg cup configured to receive leg lumber therein to lift the bracket plates up from the ground. The sawhorse is formed with two bracket plates configured with at least one of support and plank lumber configured in the respective apertures and extending between the two bracket plates and with leg lumber configured in each of the front and back leg cups of each bracket plate. The bracket plates may lean inward toward each other at a stand angle.

Abstract: An object of the present invention is to reduce an amount of use of the polishing liquid. There is provided an apparatus for polishing an object to be polished using a polishing pad having a polishing surface, the apparatus including: a polishing table for supporting the polishing pad, the polishing table being configured to be rotatable; a substrate holding unit configured to hold the object to be polished and press the object against the polishing pad; a supplying device for supplying polishing liquid to the polishing surface in a state in which the supplying device is pressed against the polishing pad; and a pressing mechanism configured to press the supplying device against the polishing pad, in which the pressing mechanism is capable of respectively adjusting pressing forces for pressing the sidewalls of on the upstream side and the downstream side of the supplying device against the polishing surface.

Abstract: The present disclosure describes an apparatus and a method for a chemical mechanical polishing (CMP) process that recycles used slurry as another slurry supply. The apparatus includes a pad on a rotation platen, a first feeder and a second feeder where each of the first and the second feeder is configured to dispense a slurry on the pad, and a flotation module configured to process a first fluid sprayed from the pad. The flotation module further includes an outlet fluidly connected to the second feeder and configured to output a second fluid, and a first tank configured to store a plurality of chemicals where the plurality of chemicals include a frother and a collector configured to chemically bond with chemicals in the first fluid.

Abstract: A roll-type cleaning member for scrubbing and cleaning a target cleaning surface of a substrate includes a plurality of nodules formed on a surface thereof. Each nodule includes a slit which extends so as not to be parallel to the rotation direction of the roll-type cleaning member, upstream edges are formed by the slit so as to serve as edges first contacting the target cleaning surface when a cleaning surface of the nodule contacts the target cleaning surface of the substrate by the rotation of the roll-type cleaning member, and the upstream edges are provided at a plurality of positions of the cleaning surface of the nodule in the circumferential direction.

Abstract: An arrangement for cooling a spindle bearing or bearings of an abrading apparatus with rotating abrading members is disclosed. This is premised on arranging in a housing of the abrading apparatus conduits which extend from a spindle bearing chamber wall of the housing to an inner suction chamber wall of the housing. Via such conduits, hot air may be expelled from a spindle bearing chamber of the housing as an overpressure in front of a protruding balancer element of a rotating shaft balancer is discharged from the spindle bearing chamber via a conduit into a suction chamber. Cool air may be conveyed from a suction chamber into the spindle bearing chamber as an underpressure behind the protruding balancer element draws in air from the suction chamber via the conduit to the spindle bearing chamber.

Abstract: A chemical mechanical polishing (CMP) system includes a polishing pad configured to polish a substrate. The CMP system further includes a heating system configured to adjust a temperature of the polishing pad. The heating system comprises at least one heating element spaced apart from the polishing pad. The CMP system further includes a sensor configured to measure the temperature of the polishing pad.

Abstract: A method of temperature control for a chemical mechanical polishing system includes directing a gas that includes steam from an orifice onto the component in the polishing system while the component is spaced away from a polishing pad of the polishing system to raise a temperature of the component to an elevated temperature, and before the component returns to an ambient temperature, moving the component into contact with the polishing pad.

Abstract: A separating device that is connectable to a vacuuming device for separating dirt particles from an air stream drawn in by the vacuuming device, containing at least one separator. The at least one separator contains an inlet opening for the air stream and a first and second outlet opening, wherein the first outlet opening serves for the exit of drawn-in dirt particles from the separator and the second outlet opening serves for the exit of the drawn-in air stream and of the drawn-in dirt particles from the separator, and wherein a first and second collection vessel for collecting the dirt particles separated from the separator is contained, and wherein the first collection vessel is positioned in a direction beneath the first outlet opening and the second collection vessel is positioned in a direction beneath the second outlet opening.

Abstract: A dust collection box for a dust extractor includes first and second air inlet chambers, an air inlet aperture through which air is drawn into the first air inlet chamber, an air outlet aperture through which air is dawn out of the second air outlet chamber, an air intermediate chamber formed in the housing, and a filter mounted within the housing. The filter includes a first part through which air passes from the air inlet chamber to the air outlet chamber, and a second part through which air passes from the air inlet chamber to the air intermediate chamber. An ambient air aperture is formed in the wall of the housing. A valve disposed proximate the ambient air aperture is switchable to connect the air intermediate chamber to only one of the air outlet chamber or the ambient air aperture.

Abstract: The present disclosure provides a floor grinding machine (1) for grinding floor surfaces of stone or stone-like material. The machine comprises a machine frame (2), a grinding head (3), supported by the machine frame (2), a motor (4), supported by the machine frame (2) and operatively connected to the grinding head (3), and a handle frame (5), extending from the machine frame (2), and pivotable relative to the machine frame (2). The machine further comprises a guide member (12), which is pivotable relative to the machine frame (2) and pivotable relative to the handle frame (5), a first locking device (14), for locking the guide member (12) relative to the handle frame (5), and a second locking device (13), for locking the guide member (12) relative to the machine frame (2). The disclosure further provides a handle for a floor grinding machine as well as methods of setting a position of a handle and methods of steering a floor grinding machine.

Abstract: A grinder tool with blind mounting of a disc includes a center alignment mechanism having a first contact and a second contact and a rotational device including an axle that is movable with respect to the center alignment mechanism. A hub is mounted to the axle including a first coupling interface. The disc has a second coupling interface for mating with the first coupling interface. The center alignment mechanism is movable a mounting distance relative to the hub and contacts the disc with the first contact and the second contact to center align the first coupling interface with the second coupling interface. The rotational device is to slowly rotate the hub to angle align the first coupling interface with the second coupling interface to allow the disc to mate and attach to the hub.

Abstract: A socket structure includes a socket body, an O-ring, and a carbon-fiber tube. The socket body includes a driving section and an acting section coaxially connected to the driving section. The driving section has an outside diameter greater than an outside diameter of the acting section and a stepped portion is formed in outer circumference between the driving section and the acting section. The driving section and the acting section have end faces that are recessed inwardly to form a driving hole and an acting hole, respectively. The outer circumferential surface of the acting section is formed with a circumferential groove in which the O-ring is received. The carbon-fiber tube is fit over the outer circumferential surface of the acting section of the socket body and has an end in abutting engagement with the stepped portion and an internal circumferential surface in contact with the O-ring.

Abstract: The present invention relates to sintered polycrystalline flat-shaped geometrically structured ceramic abrasive elements designed for the use in resin bonded wheels, particularly in cut-off wheels. The present invention also relates to a method of making such sintered polycrystalline flat-shaped geometrically structured ceramic abrasive elements and the use thereof.

Abstract: A release mechanism for an electronically triggered torque tool to tighten a screw or a similar fastener triggers at a target torque. The release mechanism comprises a drive body and a main body, which rotate around a common axis to transfer a torque. A locking mechanism couples the drive body and the main body to transfer a torque. Measuring and evaluating means to measure and evaluate the torque transferred are provided, whereby a signaling device activates the locking mechanism to decouple the drive body from the main body upon reaching a target torque.