Patents Examined by Jospeh Martinez
  • Retainer, exposure apparatus, and device fabrication method
    Patent number: 7253975
    Abstract: A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: August 7, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yukio Takabayashi