Abstract: A method and portable apparatus for self-powered, sensitive analysis of solid, liquid or gas samples for the presence of elements is provided. The apparatus includes a compact sensor system which utilizes a microwave power source and a shorted waveguide to induce a plasma. The microwave power source may be a magnetron or the like. The device includes a portable power supply and preferably includes a portable battery charger. The portable power supply includes a compact generator-internal combustion engine unit. The device can be operated by directly using power from the portable power supply or in a more compact embodiment by using power from batteries that are recharged by a separate portable power supply module. Pulsed microwave operation can be used to reduce average power requirements and facilitate the use of very compact units using batteries. The device is capable of being transported to and from remote sites for analysis by an individual without the need for heavy transportation equipment.

Abstract: A monochromator including an incident portion upon which light to be measured is made incident; a first lens for converting the incident light to be measured into parallel rays of light; a diffraction grating for receiving the light to be measured converted into the parallel rays of light and for outputting the light at an angle which differs depending on wavelength; a second lens for condensing the output light outputted from the diffraction grating at a certain angle; an output portion for outputting the output light thus condensed; and an angle changing device for making variable at least a relative angle between the diffraction grating and the second lens by one of rotation of the diffraction grating and movement of arrangement of the first and second lenses centering around the diffraction grating.

Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.

Abstract: Spatially resolved photoluminescence (PL) apparatus is used for the non-destructive characterization of a semiconductor sample. PL excitation from a diode laser is transmitted through a dichroic coupler and, in turn, over a fiber to a fiber collimator wherein the laser light is collimated into a pump beam prior to entering an air path. The air path is composed primarily of an objective lens. The objective lens focuses the pump beam on the sample surface. The photoluminescence signal emitted by the sample travels the same path but in the opposite direction as the pump beam and is collected by the same fiber as a reflected signal. The dichroic fiber coupler is used to separate the return signal from the pump beam with a low insertion loss for each beam. The return PL signal is fed to an optical spectrum analyzer using a single mode fiber connected to the coupler. The sample is placed on a rotational stage capable of x, y and z movement under computer control.

Abstract: A system and method for optically identifying a product from a reference library of known products based on a reflected spectrum of the product. A broad wavelength light source illuminates the product and a spectrometer receives and forms a plurality of finely spaced wavelengths from the reflected spectrum. A detector optically processes the wavelengths to generate signals proportional to an amount of light received at each of the wavelengths. The signals are normalized and pre-processed to form data sets which relates each of the signals to each of the finely spaced wavelengths. This is performed for all of the different products and compiled. A set of basis functions is then generated for all of the different products and a corresponding set of basis coefficients is generated for each of the different products. This information, along with an electronic label for each product, is stored to form the reference library.

Abstract: The spectroscopic process uses a detector in the form of a linear array of detector units made of a photoconductive semiconductor material, wherein a radiation sample is broken down into its spectrum; the spectrum thus obtained is used to illuminate the detector and is evaluated making use of the dependence of the conductivity of the semiconductor material on the radiation intensity; the beam path between the sample and the detector is periodically interrupted by a chopper to generate dark and bright phases; when at least one measuring cycle is conducted, a measuring cycle is determined during both the dark and bright phases in one measuring period, and the intensity of the radiation impinging on the detector in the bright phase is found from the comparison between the dark phase and light phase; the interruptions in the radiation and the measuring periods are mutually synchronized so a measuring period lies either within a bright or within a dark phase, with the measuring period being variable and adjustable

Abstract: A system for vertical seismic profiling of an earth borehole includes an optical fiber having a plurality of Bragg grating sensors formed therein, each one of the Bragg grating sensors being tuned to reflect a respective bandwidth of light, each bandwidth having a different respective central wavelength. Each of the Bragg grating sensors are responsive to an input light signal, a static strain, a dynamic strain and a temperature strain for each providing a respective light signal indicative of static and dynamic forces and temperature at a respective sensor location. The physical spacing and wavelength spacing of the Bragg grating sensors are known such that each of the sensing light signals are easily correlated to a specific depth.

Abstract: An object recognition system comprises a sensing apparatus for collecting light reflected from objects presented at a point-of-sale machine. The sensing apparatus includes a mechanism, such as a holographic disk or diffraction grating, for separating the color components of the light reflected from the object and directing, the color components onto an optical detector such as a two-dimensional imaging array, or a one-dimensional imaging array or single photo-sensitive optical cell used in conjunction with a rotating mirror. A pattern recognizer compares the spectral response, including the locations, amplitudes and widths of energy peaks of the different color components, against premeasured characteristics of known objects in order to classify the object. The weight of the object can be measured with a scale, and the density of the object calculated, with the weight and density being used by the pattern recognizer to further classify the object.

Abstract: A security card system that includes a security card having an appearance like a real credit card or other bank card, and a security network that contains a security firm that enrolls persons in the system who have been provided with a security card by a card-issuing institution, and uses the security network for responding to emergency calls initiated by use of the security card, reports fraud, and in general, implements an emergency system and acts as a theft deterrent.

Abstract: A processing unit reads out, from a memory, wavelength setting data corresponding to wavelength information from a key input section, and outputs a wavelength setting command corresponding to the wavelength setting data to a tunable-wavelength control section and a spectral wavelength control section. The tunable-wavelength control section controls a tunable-wavelength light source section to output a laser beam having a wavelength corresponding to the wavelength setting data. The spectral wavelength control section controls a spectroscope section to perform spectroscopy of the light having the wavelength corresponding to the wavelength setting data and output the resultant light. Output light from the tunable-wavelength light source section whose wavelength has been set is input to an object to be measured. Light passing through the object is input to the spectroscope section. The spectroscope section performs spectroscopy of only the light having the wavelength corresponding to the wavelength setting data.

Abstract: A method and apparatus are provided for obtaining molecular information about materials at a selected site on or in a semiconductor topography. In a preferred embodiment, the selected site is a defect from a defect map generated by an automated wafer inspection system. A sample stage and drive/alignment system are used to move the semiconductor topography such that a selected defect is aligned with the illumination provided by a radiation scattering measurement system. A Raman spectroscopy system may be used for the radiation scattering measurement. The intensity and frequency of inelastically scattered radiation from the vicinity of the selected defect is compared to standard spectra to determine the chemical composition and material phase of the region analyzed. The depth into the topography probed may be adjusted by changing the wavelength of radiation used in the Raman spectroscopy measurement.

Abstract: An apparatus for remotely sensing and identifying chemical and biological terials comprising an interrogation component having a first and second infrared radiation source providing a predetermined exciting energy and a predetermined referencing energy, a collection component for collecting backscattering radiation, an optical analysis component for converting the collected backscattered radiation into Mueller matrix elements, a filter component for pattern recognition from the Mueller matrix for specific predetermined materials and a comparison component for determining the presence of specific predetermined materials. A method for identifying chemical and biological materials is disclosed.

Abstract: An apparatus for testing sheet material includes an illumination device which illuminates the sheet material continually and in the total spectral region to be tested, and a receiving device having at least two linear parallel CCD arrays. A filter transmitting a certain spectral region is mounted on each CCD array. The individual filters are selected so that at least one transmits in the visible spectral region and one in the invisible spectral region. For detection of the light diffusely reflected or transmitted by the sheet material, the individual CCD arrays produce electric signals from the received light which are then processed in an evaluation device and compared with reference data for testing the sheet material.

Abstract: A color measuring sensor assembly includes an optical filter such as a linear variable filter, and an optical detector array positioned directly opposite from the optical filter a predetermined distance. A plurality of lenses, such as gradient index rods or microlens arrays, are disposed between the optical filter and the detector array such that light beams propagating through the lenses from the optical filter to the detector array project an upright, noninverted image of the optical filter onto a photosensitive surface of the detector array. The color measuring sensor assembly can be incorporated with other standard components into a spectrometer device such as a portable calorimeter having a compact and rugged construction suitable for use in the field.

Abstract: Prior art methods calibrate the travel path and/or the angular position of holding devices in equipment for manufacturing electrical assemblies by optical measurements of the position of simulations of electrical components that are equipped on a calibration substrate. Markings on the simulations and local reference marks on the calibration substrate serve this purpose. Printed circuit board cameras that are utilized as optical sensors exhibit a pronounced camera distortion that makes the calibration more difficult. As a result of the method, the apparatus as well as the calibration substrate, a sensor correction factor is determined in that the position of two correction marks that are applied on the calibration substrate at a predetermined nominal spacing and a predetermined position relative to one another are measured with the printed circuit board camera. The result of the measurement is compared to the nominal spacing.

Abstract: A contact block for a smart card reader includes a plurality of contacts having first ends electrically connected to a printed circuit, and portions arranged to project beyond a surface of a contacts carrier and engage terminals of the smart card when the smart card is in an end position. A one piece switching contact also includes a portion that projects beyond the surface of the contacts carrier, the projecting portion extending into a path of the smart card to be engaged and moved by the smart card as the smart card is moved to the end position. A second portion of the one piece switching contact faces the printed circuit and is moved into engagement with a conductive path of the printed circuit as a result of engagement and movement of the first portions ofthe switching contact in response to movement of the smart card into the end position.

Abstract: A chip leveling apparatus of wafer exposure equipment adjusts the diameter of the light incident on a wafer according to the chip size so that the inclination of that area can be accurately detected for use in leveling the wafer in preparation for exposure. A wafer leveling stage supports the wafer during its exposure. A stage driving mechanism can adjust the inclination of the wafer leveling stage relative to the horizontal. A light source produces a collimated beam of light which is directed towards the wafer exposure field at an acute angle. A location sensor is fixed in position to receive the light once the light has reflected from the exposure field, and thereby senses the inclination of the exposure field. A computer controller receives information from the sensor and controls the stage driving mechanism accordingly.

Abstract: Manually portable reflectance spectrometer and method of detection of absorption and reflection of light, wherein the visible and invisible (infrared) light is derived from LEDs. A phototransistor or photodiode measures the light reflected by the surface being measured, and a digital converter ADC translates the phototransistor's output into a digital format display. Three or more LEDs blue, aqua, green, yellow, orange, crimson, red and infrared provide a range of readings across the visible and infrared spectrum.

Abstract: A detecting system for detecting positional information related to a surface of an object. The detecting system includes a variable pattern generator for projecting an arbitrary pattern image on the surface of the object, a light projecting optical system for projecting a pattern, defined by the variable pattern generator, to the surface of the object along an oblique direction, a light receiving optical system for directing light from an image of the pattern and a light receiving element for detecting the light directed by the light receiving optical system. Surface position information about the surface of the object is detected on the basis of the detection by the light receiving element.

Abstract: A high precision alignment apparatus is provided that utilizes a semiconductor laser device, such as a laser diode, to provide a source laser beam. The alignment apparatus permits the division of a pair of beam components from the source laser beam useful for either linear or planar alignment. A centroid measurement between the beam components provides a corrected reference point that accounts for the inherent instability of the source laser beam to yield a high level of alignment accuracy. For linear alignment purposes, the beam components are collinearly directed. In the alternative, for planar alignment purposes, the beam components may be either collinear or directed in opposite directions, and rotated to sweep respective planar regions. The laser alignment apparatus is capable of providing a level of accuracy heretofore achievable only with gas lasers, while maintaining the economical attributes of commercial semiconductor laser diodes.